Canon Kabushiki Kaisha

Fujitsu Semiconductor Limited

Canon Kabushiki Kaisha Kaisha

Kazuhiro Asai

Keiji Matsumoto

Yoshinori Tagawa

Koji Sasaki

Jun Yamamuro

Kenji Fujii

Masahiko Kubota

Satoshi Ibe

Tamaki Sato

Seiichiro Yaginuma

Takumi Suzuki

Masahisa Watanabe

Masaki Ohsumi

Maki Kato

Ryoji Kanri

Akihiko Okano

Hirokazu Komuro

Shuji Koyama

Takuya Hatsui

Shoji Shiba

Hitoshi Saito

Yoshiyuki Imanaka

Makoto Watanabe

Shingo Nagata

Hiroyuki Murayama

Kouichi Nagai

Naozumi Nabeshima

Toru Yamane

Keiji Watanabe

Souta Takeuchi

Kousuke Kubo

Kunihito Uohashi

Hiroto Komiyama

Ryotaro Murakami

Keiji Edamatsu

Maki Hatta

Masataka Nagai

Keisuke Kishimoto

Tomohiko Nakano

Haruka Nakada

Shimpei Otaka

Toshiaki Kurosu

Hiroe Ishikura

Mitsuru Chida

Tetsuro Honda

Makoto Takahashi

Kaoru Saigoh

Tetsushi Ishikawa

Etsuko Hino

Katsuhiro Sato

Yukimasa Miyazaki

Kaoru Sugawara

Yoshikazu Saito

Kenji Tamamori

Takanobu Manabe

Manabu Otsuka

Shinsuke Tsuji

Yasuaki Tominaga

Yuuji Tamaru

Kenta Furusawa

Kouji Sasaki

Masahito Kudou

Masahito Kudo

Watanabe Makoto

Kurosu Toshiaki

Manabe Takanobu

Fujii Kenji

A liquid ejection head includes a base plate and at least two device chips in which ejection ports for ejecting a liquid are formed and which are disposed on the base plate. At least one first reference mark is provided on the base plate. A second reference mark is provided on each of the device chips. At least one space is formed between adjacent device chips. The second reference marks and the first reference mark present in the space are disposed on an array axis along which the device chips are arrayed.

Liquid ejection head and process for producing liquid ejection head

A manufacturing method for a structure includes preparing a dry film supported on one surface of a support; bonding the dry film to a substrate so that the dry film and the substrate are in contact with each other; performing first exposure of the dry film bonded to the substrate via the support; removing the support after the first exposure; performing second exposure of the dry film after the support is removed via a photomask; and developing the dry film after the first exposure and the second exposure.

Manufacturing method for structure and manufacturing method for liquid ejection head

Provided is a method of manufacturing a liquid ejection head, which is capable of patterning a dry film while suppressing deformation of the dry film caused by a pressure. The method of manufacturing a liquid ejection head includes: preparing a substrate including an ejection orifice member on a first surface; forming, on an ejection orifice surface of the ejection orifice member, a protection film having communicating holes for allowing ejection orifices to communicate to outside; closing an opening of a supply port on a second surface on a side opposite to the first surface of the substrate with a dry film; and patterning the dry film by irradiating the dry film with light under a state in which the protection film is formed on the ejection orifice surface.

Method of manufacturing a liquid ejection head

A method of manufacturing a liquid ejection head includes forming a resist film on a first surface of a light-transmitting support having the first surface and a second surface being a back surface of the first surface; bonding a back side of the surface of the resist film to the support side on a substrate having a through hole so as to block the through hole; exposing the resist film with light transmitted from the second surface to the first surface of the support and forming a portion which is removable with a dissolving liquid and a portion which remains against the dissolving liquid on the resist film; immersing the substrate and the exposed resist film in the dissolving liquid, allowing the dissolving liquid to enter the through hole, and removing the removable portion; and peeling the support from the resist film from which the removable portion has been removed.

Method of manufacturing liquid ejection head and method of forming resist

A method for manufacturing a liquid discharge head includes a transferring step of transferring a dry film supported by a supporting member to a substrate having a hole, and a peeling step of peeling the supporting member off the dry film on the substrate. In the peeling step, the dry film is in contact with a wall surface defining the hole in the substrate.

Method for manufacturing liquid discharge head

A liquid ejection head is manufactured by covering a mold material arranged on a patterned protecting layer on a substrate and subsequently removing the mold material to produce a flow path. A sacrificial layer employed as the mold material operates as mask for patterning the protecting layer.

Method of manufacturing liquid ejection head

A liquid ejection head has an ejection port forming region which includes liquid ejection energy generating elements arranged on a substrate, liquid supply ports each running through the substrate and having an opening at a surface of the substrate, a liquid path formed on the surface as a space containing the liquid ejection energy generating elements and the liquid supply ports therein, and ejection ports corresponding to the respective liquid ejection energy generating elements. The liquid ejection head is manufactured by forming a liquid path forming layer on the substrate using a dry film resist, forming an ejection port forming layer on the liquid path forming layer, forming a liquid path in the liquid path forming layer and ejection ports in the ejection port forming layer. The substrate has dummy holes each having an opening at a surface of the substrate outside the ejection port forming region.

Liquid ejection head manufacturing method

A method for manufacturing a liquid ejection head including the steps of preparing a substrate including, on a surface of the substrate, a layer having a plurality of openings in which opening portions of supply portions are located and which are arrayed in an array direction and another opening which is different from the plurality of openings and is located beyond the array end portion in the array direction, and attaching a dry film for forming flow passages to the substrate and the layer.

Method for manufacturing liquid ejection head

A process for producing a liquid discharge head including a substrate having a liquid supply path passing through from its first surface to second surface and an discharge port forming member having a discharge port communicating with the supply path through a flow path, the process including providing a first layer of photosensitive resin in a region covering an opening of the supply path in the first surface; forming a latent image of a pattern of the flow path in the first layer by exposure; providing a second layer of negative photosensitive resin on the first layer; curing a portion, opposing to the opening of the supply path in the first surface, of the second layer; forming a latent image of a pattern of the discharge port in the second layer by exposure; and developing latent images of patterns of the flow path and discharge port.

Process for producing liquid discharge head

A liquid ejection head includes a liquid ejection board and a liquid ejection head component disposed on the liquid ejection board. The liquid ejection board includes a substrate, an energy generating device on the substrate, a channel defining member defining a liquid channel and having a liquid ejection opening in communication with the liquid channel, a liquid supply passage in communication with the liquid channel, a liquid supply opening in communication with the liquid supply passage and having a smaller opening cross-sectional area taken in a direction perpendicular to a flow direction of a liquid than the liquid supply passage, and an opening in communication with the liquid channel. The liquid channel allows a liquid to be in contact with the energy generating device. The liquid ejection opening allows a liquid to be ejected therethrough. The liquid ejection head component closes at least a portion of the opening.

Liquid ejection head and method of producing the same

A liquid ejection head includes a substrate having an energy generating element arranged therein and an ejection port forming member laid as superposed above the substrate. At least one ejection port is formed so as to run through the ejection port forming member. The ejection port forming member has a concave portion including the ejection port formed therein on the surface thereof opposite to the surface thereof facing the substrate, and has a convex portion on the surface of the ejection port forming member facing the substrate so as to correspond to the concave portion.

Liquid ejection head and method of manufacturing the same

Growing community of inventors

Kawasaki, Japan

Kazuhiro Asai