Tokyo Electron Limited

Covalent Materials Corporation

Kazuhiko Shimanuki

Daisuke Hayashi

Takanori Saito

Ken Nakao

Norihiko Saito

Hiroyuki Honma

Hideyuki Yokoyama

A planar heaterin which a power supply terminal unitwhich supplies an electric power is arranged on a central portion on a lower surface of a silica glass plate-like member. The power supply terminal unit includes small-diameter silica glass tubesand, which contain a connection line which supplies an electric power to a carbon heat generator and a large-diameter silica glass tubewhich contains the small-diameter silica glass tubesand. A flange portionis formed on a lower end of the large-diameter silica glass tube, and a bent portionhaving different diameters is formed between an upper end of the large-diameter silica glass and the flange portion, and the first heat shielding platesandconfigured by metal plates or opaque silica glass plates are contained in the large-diameter silica glass tube below the bent portion.

Planar heater

It is provided that a reflection plate of semiconductor heat treatment, which is resistant to cracks or deformations by controlling the adsorption of foreign materials and the production of reaction. Said reflection platefor semiconductor heat treatment is composed of a disk-shaped or ring-shaped plate of optically transmissible material and a plateof inorganic material hermetically enclosed in said disk-shaped or ring-shaped plate, in which said plate of inorganic material has at least one side in contact with said plate of optically transmissible material, said at least one sidehaving a surface roughness of Ra 0.1 to 10.0 &#x3bc;m, said at least one sideformed groovestherein.

Reflection plate for semiconductor heat treatment and manufacturing method thereof

Growing community of inventors

Yamagata, Japan

Kazuhiko Shimanuki