Denso Corporation

Tokyo University of Science Foundation

Kazuhiko Kanoh

Noriyuki Matsushita

Yumi Tanaka

Yoshihiro Kozawa

Hiroyuki Wado

Tomoya Maruyama

Katsuyoshi Saiki

Yuki Kotaka

Hirotoshi Otsuka

Hiroshi Okamoto

Naoya Morioka

An electret includes an electret layer. The electret layer is formed by subjecting a composite film in which inorganic dielectric particles are dispersed and held in a base film to a polarization treatment. The inorganic dielectric particles are mainly composed of an inorganic dielectric material having a bandgap energy of 4 eV or more.

Electret

An electret includes a substrate and an electret layer formed above a surface of the substrate. The electret layer is a composite metal compound containing two or more different metal elements, and is obtained by subjecting a thin film mainly composed of an inorganic dielectric material having a bandgap energy of 4 eV or more to a polarization treatment.

An electret includes a composite oxide having an ABOtype perovskite structure containing two different metal elements A and B. The composite oxide is in a polarized state, at least a part of one of the metal elements A and B is substituted with a dopant element having a lower valence than the one of the metal elements A and B, and the composite oxide has a bandgap energy of 4 eV or more.

A method of producing a structure by three-dimensionally processing a flat member includes a preparing, a first forming and a second forming. In the preparing, a substrate is prepared. In the first forming, an etching mask is formed on the substrate. The etching mask has at least two openings, and areas of the two openings are different from each other. In the second forming, at least a part of a three-dimension surface shape of the structure is formed on a surface of the substrate by a dry-etching on the substrate in accordance with the area of the opening of the etching mask.

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Kariya, Japan

Kazuhiko Kanoh