Japan E.m. Co., Ltd.

Nec Corporation

Infutec Inc.

Kazuhiko Futakami

Yuzo Shimada

Sakae Kitajo

Ichiro Hazeyama

Akeo Katahira

Masaru Terashima

Jun Ishida

Masahiro Kubo

Nobuaki Takahashi

Naoji Senba

Hitoshi Anma

Tosiji Yamada

Shinichi Ishiduka

Takumi Yamamoto

Susumu Nanko

Akira Hatase

A method of arranging microspheres with liquid, a microsphere arranging device, and a semiconductor device are provided. The method comprising the steps of placing the semiconductor device with a large number of pads with holes, on a loading table with a variable tilt angle, and pouring microspheres together with conductive liquid held in a holding container onto the semiconductor device. The microspheres are storably placed in the holes on the pads of the semiconductor device. The non-stored microspheres and conductive liquid are accumulated in a receiving tank, and the conductive liquid including the accumulated microspheres are transferred to the holding container by a pump.

Method of arranging microspheres with liquid, microsphere arranging device, and semiconductor device

Conductive balls are transferred from a pallet onto an array of conductive pads on a semiconductor chip by means of a transfer apparatus; the transfer apparatus includes a pallet formed with an array of recesses same in pattern as the array of conductive pads, a movable head formed with an array of vacuum holes and a driving mechanism for moving the head from an idle position onto the pallet and from the pallet to the semiconductor chip; when the head is moved to the pallet, the vacuum holes are connected to the recesses so as to confine the conductive balls in the narrow spaces; the vacuum is developed; then the conductive balls are traveled through the closed spaces to the vacuum holes; even if the conductive balls have been charged, the conductive balls are never attracted to the adjacent balls, and are surely captured by the vacuum holes.

Transfer apparatus for arraying small conductive bumps on a substrate and/ or chip

Transfer apparatus for arraying small conductive bumps on substrate and/ or chip

An apparatus for lining up micro-balls in accordance with the present invention includes: ball carrying pallets having a plurality of pits for holding the micro-balls, respectively, on its surface, a pallet holder for holding the ball carrying pallets, a lining-up container defining a sealed chamber in association with the pallet holder hermetically fitted thereto, a storing tank for storing liquid carrier in which micro-balls are dispersed, and applying/collecting device for communicating the storing tank with the lining-up container via a passage to supply the micro-balls together with the liquid carrier from the storing tank to the sealed chamber and return the surplus micro-balls together with the liquid carrier from the sealed chamber to the storing tank.

Method and apparatus for lining up micro-balls

An apparatus adapted for practice of ambulation is provided in which a suspending arm for suspending a patient at a point in the distal portion is supported at a fulcrum, a force to balance the load based on the suspended patient is conveyed to the suspending arm on the side of, or opposite to the suspending point with respect to the fulcrum. A vertical rod is actuated by a force producing means in the vertical direction and the vertical rod is engaged with the suspending arm in the proximate portion thereof by an engaging means, which converts the vertical motion of the vertical rod to the pivoting motion of the suspending arm around the fulcrum. The suspending arm is prevented from longitudinal shift. The apparatus is adapted for assisting the patient in walking, preventing the patient from wobbling.

Apparatus for practice of ambulation

An apparatus for the practice of ambulation comprises a suspension member for suspending a patient, a weight sensor for detecting a weight applied to the suspension member, an air cylinder or motor for producing a predetermined suspension force to be conveyed to the suspension member, a horizontal arm for supporting the suspension member, and a rotation axle for rotating the horizontal arm and the suspension member so that the patient who is suspended by the suspension member can be trained in walking in accordance with a predetermined suspension force which is proportional to a weight detected by the weight sensor.

Apparatus for the practice of ambulation

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Shizuoka, Japan

Kazuhiko Futakami