Kabushiki Kaisha Toshiba

Thermalytica, Inc.

Kazuhide Matsumoto

Masashi Takahashi

Masayuki Itoh

Kunihiko Wada

Masahiro Saitou

Kazuo Saito

Akinori Koga

Kazutoshi Takaishi

Hsin-Tsai Wang

A vapor deposition device for forming a ceramic coating on a substrate, the device including a coating chamber, loading chambers, substrate support mechanisms, horizontal moving mechanisms, and reversing mechanisms, and configured as follows. The coating chamber and each loading chambers are connected individually to a vacuumizer and are connected to each other at their openings. In the coating chamber, an electron gun is provided that emits an electron beam with which the held ceramic raw material is irradiated. Each of the substrate support mechanisms includes left and right partition walls, a left substrate support plate on the left side of the left partition wall, and a right substrate support plate on the right side of the right partition wall. Each of the substrate support plates has multiple substrate mounting portions for mounting substrates thereon. The left and right substrate support plates are capable of revolving in a plane parallel to the left and right partition walls, and each of the multiple substrate mounting portions is capable of rotating. Each of the horizontal moving mechanisms is configured to cause the substrate support mechanism to move horizontally in the left-right direction between a vapor deposition position where one of the partition walls is in close contact with the opening and a reverse position where the left and right sides of the substrate support mechanism are reversed.

Vapor deposition device

A separator of a proton exchange fuel cell. In a cell stack of a proton exchange fuel cell, the cell stack composed by laminating a plurality of unit cells and a plurality of separators, each of the unit cells composed of an anode electrode, a cathode electrode and a solid polymer electrolytic membrane arranged between the anode and cathode electrodes, each of the separators arranged between the unit cells, respectively, the separator of the proton exchange fuel cell includes a separator substrate and a multi-coating layer formed on the separator substrate. The multi-coating layer includes at least two layers of a low electric resistance layer, a corrosion resistance layer and a peeling resistance layer.

Separator of proton exchange fuel cell and its manufacturing method

A high temperature component such a gas turbine high temperature component, for example, constituting movable or stationary blade portion, thereby comprises a base material and a thermal barrier coating coated on a surface of the base material. The thermal barrier coating has a thermal barrier characteristic controlled in accordance with an environment to which a high temperature component is exposed so as to make substantially uniform a surface temperature of the base material. The thermal barrier coating comprises a thermal barrier ceramic layer having a thermal barrier characteristic capable of being controlled by varying a thickness thereof at portions of the thermal barrier ceramic layer.

High temperature component, gas turbine high temperature component and manufacturing method thereof

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Tokyo, Japan

Kazuhide Matsumoto