Nippon Valqua Industries, Ltd.

Kazuaki Tsuji

Tsutomu Yoshida

Nobuhiro Yoshida

Masato Hamade

Provided is a seal that can ensure a satisfactory sealing property and can be easily separated from a sealing surface even in the case in which the seal is used for a long period of time under the conditions of a high temperature and a high pressure. The seal includes a seal body mounted in a seal groove that is formed in a first member and a second member is made to be in pressure contact with the first member to form a sealing part. The sealing part that comes into contact with the second member at the entire surface of the sealing part is formed along the entire circumference of the outer peripheral surface of the seal. A step portion is formed on the outer peripheral surface of the seal in such a manner that an area of a contact surface is smaller for the sealing part as the contact area is closer to the bottom side of the seal groove.

Seal material

In a vacuum gate valve, a seal member for sealing a gate opening part is bonded to an outer edge part of a planar seal plate that is disposed in such a manner that the planar seal plate is opposed to a valve seat surface of the gate opening part and comes into contact with the valve seat surface. The seal member includes a vacuum seal part that is located on a side farther from the gate opening part and maintains the sealability of the gate opening part when the gate opening part is closed, and also includes a radical seal part that is located on a side closer to the gate opening part and that prevents the seal member from being affected by a treatment gas in the gate opening part when the gate opening part is closed. The vacuum seal part is made of a rubber elastic body, and the radical seal part is configured by providing a radical resistant body that is provided with an excellent radical resistance on the rubber elastic body.

Seal plate, seal member that is used in seal plate, and method for manufacturing the same

A sealing material in a closed circular shape for a dovetail groove formed on the surface of one member and to be abutted to the surface of the other member to seal a space between the both members, the sealing material for a dovetail groove in a cross-sectional shape includes: a bottom portion that comes into contact with the bottom face of the dovetail groove and that has corner portions formed slightly narrower than the narrowest width of the opening portion of the dovetail groove; a side protruding portion that is formed continuously from the bottom portion; an overhanging shoulder portion that is formed continuously from the side protruding portion; and a sealing protrusion that is formed continuously from the overhanging shoulder portion and that is protruded upward from the opening portion of the dovetail groove to seal a space between the both members in the case in which the sealing protrusion is abutted to the surface of the other member.

Sealing material for dovetail groove and vacuum gate valve provided with sealing material for dovetail groove

A gate valve for vacuum capable of preventing a seal member from being cracked or particles from being produced due to a stress concentration even if the seal member is repeatedly compressed in the state that the adhesive agent is separated from the open side of a seal member mounting groove and capable of suppressing particles from being produced due to the rub of the seal top part with the seal surface.

Gate valve for vacuum and seal member used therefor

There is disclosed a sealing material for an ant groove, wherein the sealing material is easy to fit to the ant groove and little involves a phenomenon such that the sealing material unfavorably slips out of the ant groove in the form of remaining fixing to the opposite member when the sealed place is opened, and wherein the sealing material can exercise the good sealing function. The sectional shape of the sealing material has: a straight bottom edgewhich is disposed on a bottom face of the ant groove; an arched convex edgewhich contacts with the other member; a first projecting edgewhich projects outside; a concave inlet portion; a second projecting edge which is composed of straight linesthat project outside; a straight sloping edge; and at least one corner portion-which is constituted in the range of from the straight bottom edgevia the second projecting edgeto the sloping edge

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Machida, Japan

Kazuaki Tsuji