Tokimec Inc.

Kazuaki Tani

Takeshi Hojo

Isao Masuzawa

Takao Murakoshi

Takafumi Nakaishi

Shigeru Nakamura

An acceleration detection gyro apparatus is of the electrostatic supporting type. This gyro apparatus call be made inexpensive, long in life, excellent in durability and can be applied to a wide variety of fields. A gyro rotor (20) is supported relative to a gyro case (21) by an electrostatic supporting force in a non-contact fashion and rotated about the spin axis along the Z axis by a rotor driving system. The gyro rotor (20) is disk-shaped and constructed by forming metal thin film electrodes on both surfaces of a plate member made of preferably an insulating material. The gyro apparatus includes a slave control system for slaving a displacement of the gyro rotor (20) relative to the gyro case (21) in the Z-axis direction (spin axis direction) and a central position control system for slaving a displacement of the gyro rotor (20) in the X-axis and Y-axon directions.

Method of making a gyro apparatus

An acceleration detection gyro apparatus is of the electrostatic supporting type. This gyro apparatus can be made inexpensive, long in life, excellent in durability and can be applied to a wide variety of fields. A gyro rotor (20) is supported relative to a gyro case (21) by an electrostatic supporting force in a non-contact fashion and rotated about the spin axis along the Z axis by a rotor driving system. The gyro rotor (20) is disk-shaped and constructed by forming metal thin film electrodes on both surfaces of a plate member made of preferably an insulating material. The gyro apparatus includes a slave control system for slaving a displacement of the gyro rotor (20) relative to the gyro case (21) in the Z-axis direction (spin axis direction) and a central position control system for slaving a displacement of the gyro rotor (20) in the X-axis and Y-axis directions.

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Yaita, Japan

Kazuaki Tani