Rigaku Industrial Corporation

Rigaku Innovative Technologies, Inc.

Kazuaki Shimizu

Yuriy Platonov

The present invention provides a multilayer structure including a substrate having formed on a surface thereof at least one period of individual layers, the period having at least two layers including a first layer which includes magnesium silicide and a second layer which includes at least one of tungsten, tantalum, cobalt, nickel, copper, iron, chromium, alloys, oxides, borides, silicides, and nitrides of these elements, silicon, carbon, silicon carbide, boron, and boron carbide. If the period includes three layers, the second layer includes one of silicon, carbon, silicon carbide, boron, and boron carbide and a third layer includes one of tungsten, tantalum, cobalt, nickel, copper, iron, chromium, and alloys, oxides, borides, silicides, and nitrides of these elements, the second layer being disposed between the first and the third layers. If the period includes four layers, a fourth layer includes one of silicon, carbon, silicon carbide, boron, and boron carbide, the third layer being disposed between the second and fourth layers, and the fourth layer being disposed between the third layer of multilayer period n and the first layer of multilayer period n&#x2212;1.

Magnesium silicide-based multilayer x-ray fluorescence analyzers

There is provided a multilayered spectroscopic device effective to achieve in a short length of time the highly accurate fluorescent X-ray analysis of boron wherein the influence that may be brought about by the interfering X-rays and the background is sufficiently reduced and the strength of reflection of B-K&agr; line is sufficient. In this multilayered spectroscopic device lanthanum (La), an alloy containing lanthanum as a principal component or lanthanum oxide (La O ) is used for the reflecting layers and boron is used for the spacer layers and the periodic length d is chosen to be within the range of 7 to 14 nm and the film thickness ratio of the reflecting layers to the spacer layers is chosen to be within the range of 2/3 to 3/2. It has a total laminated film thickness t of a value sufficient to allow the strength of reflection of B-K&agr; line to be equal to or higher than 98% of a saturation value.

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Osaka, Japan

Kazuaki Shimizu