Ebara Corporation

Kazuaki Maeda

Tamami Takahashi

Masaya Seki

Hiroaki Kusa

Masanori Goto

Hiroyuki Shinozaki

Akihisa Hongo

Junichiro Yoshioka

A polishing apparatus polishes a periphery of a substrate by bringing a polishing tool into sliding contact with the substrate. The polishing apparatus includes a substrate-holding mechanism configured to hold a substrate and rotate the substrate, a polishing mechanism configured to press a polishing tool against a periphery of the substrate so as to polish the periphery, and a periphery-supporting mechanism configured to support the periphery of the substrate by a fluid. The periphery-supporting mechanism is configured to support a surface of the substrate from an opposite side or the same side of the periphery of the substrate.

Polishing apparatus

An energy recovery apparatus used in the seawater desalination system includes a cylindrical chamber (CH) having a space for containing concentrated seawater and seawater therein and being installed such that a longitudinal direction of the chamber is placed in a vertical direction, a concentrated seawater port (P) provided at the lower part of the chamber (CH) for supplying and discharging the concentrated seawater, a seawater port (P) provided at the upper part of the chamber (CH) for supplying and discharging the seawater, a flow resistor () provided at a concentrated seawater port side in the chamber, and a flow resistor () provided at a seawater port side in the chamber. A circular plate () having a hole at the center thereof is provided between the concentrated seawater port (P) and the flow resistor (), or between the seawater port (P) and the flow resistor ().

Seawater desalination system and energy recovery apparatus

An energy exchange chamber is used for exchanging pressure energy between concentrated seawater discharged from a reverse-osmosis membrane-separation apparatus and a part of seawater to be treated by the reverse-osmosis membrane separation apparatus in a seawater desalination system. The energy exchange chamber includes a concentrated seawater distributor communicating with a concentrated seawater port and configured to distribute a flow of concentrated seawater all over a horizontal plane of an interior of a chamber, and a seawater distributor communicating with a seawater port and configured to distribute a flow of seawater all over the horizontal plane of the interior of the chamber. The concentrated seawater and the seawater introduced into the chamber are brought into direct contact with each other over the horizontal plane of the interior of the chamber to exchange pressure energy between the concentrated seawater and the seawater introduced into the chamber.

Seawater desalination system and energy exchange chamber

A spin processing apparatus can prevent contamination of workpieces by wear particles, and can operate at high efficiency while lowering the noise level associated with the operation of the apparatus. The spin processing apparatus includes a chamber, a spin holder disposed inside the chamber for holding workpieces, and driver device for rotating the spin holder. A supporting device is provided for rotatably supporting the spin holder in a non-contact manner through a magnetically-operated mechanism.

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Tokyo, Japan

Kazuaki Maeda