Globalfoundries U.S. Inc.

Kavya Sree Duggimpudi

Haiting Wang

Daniel J Jaeger

Michael Vincent Aquilino

Man Gu

Wang Zheng

Bradley Morgenfeld

A semiconductor device is provided, which includes an array of active regions, gate stacks and substantially uniform epitaxial structures. The gate stacks of the array include a first gate stack and a second gate stack over an active region. An active pillar between the first gate stack and the second gate stack, and the active pillar separating two substantially uniform epitaxial structures. A contact structure over the active pillar, positioned equidistant from the first gate stack and the second gate stack.

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Clifton Park, NY, United States of America

Kavya Sree Duggimpudi