Kabushiki Kaisha Toshiba

Canon Kabushiki Kaisha

Toshiba Tec Kabushiki Kaisha

Katsuyuki Soeda

Tsuyoshi Sato

Shuichi Kimura

Naoaki Sakurai

Hiroyasu Kondo

Shizuo Kinoshita

Hiroshi Koizumi

Kenichi Ooshiro

Haruhiko Ishihara

Junsei Yamabe

Masakuni Ikagawa

An ink head includes: a common ink chamber; a first nozzle including a first nozzle hole, a first flow channel and the common ink chamber, and a first actuator; and a second nozzle including a second nozzle hole, a second flow channel and the common ink chamber, and a second actuator, the second nozzle being adjacent to the first nozzle in a first direction. The first flow channel is linked to the common ink chamber via a first opening. The second flow channel is linked to the common ink chamber via a second opening. A center position of the first opening is shifted from a center position of the second opening in at least a third direction, the third direction crossing the first direction when viewed along a second direction, the second direction being from the common ink chamber toward the first flow channel.

Ink head

According one embodiment, a film forming apparatus includes a stage, a coating section, a vapor supply section, a blower section, and a controller. On the stage, an coating target is placed. The coating section applies a material to a predetermined region on the coating target placed on the stage to form a coating film. The vapor supply section generates solvent vapor capable of dissolving the coating film. The blower section blows the solvent vapor generated by the vapor supply section onto the coating film on the coating target placed on the stage. The controller controls an amount of the solvent vapor to be blown by the blower section so that: the coating film is dissolved; viscosity in a part of the coating film on a surface layer side is lower than that in a part thereof on the coating target side; and the viscosity in the part on the surface layer side and the viscosity of the coating target side take such values that prevent the coating film on the coating target from spreading.

Film forming apparatus, film forming method, and semiconductor device

A coater () includes: a droplet jet part () which ejects droplets of a first solution toward an object to be coated () to apply the droplets to the object to be coated (); and a remoisturizing-drying part () which gives a residue of the first solution applied on the object to be coated () a solvent capable of dissolving the residue to form an applied body with a second solution containing the residue as a solute, and which dries the formed applied body with the second solution.

Coater, method for manufacturing coated article, and fluid blowing unit

Growing community of inventors

Yokohama, Japan

Katsuyuki Soeda