Kubota Corporation

Dainippon Screen Mfg. Co., Ltd.

Nippon Densan Corporation

Katsuyuki Miyake

Tomoyoshi Sawada

Atsuro Eitoku

Kaoru Shinbara

Mutsumi Sunahata

A blocking plate is disposed to face a substrate which is held by substrate holding device. A processing fluid is supplied to a surface of the substrate while supplying inert gas into a space between the substrate and the blocking plate. Since the inert gas flows along the surface of the substrate within the space between the substrate and the blocking plate, no turbulence which whirls upward is created at the surface of the substrate. This prevents the pollutants from adhering to the substrate and improves the quality of the substrate.

Method of and apparatus for processing substrate

A torque transducer including a ferromagneto-stricting device provided for a rotational shaft, a magnetic field supply device for supplying a magnetic field to the ferromagneto-stricting device, a sensing device for sensing a change in the magnetic permeability of the ferromagneto-stricting device caused by torque applied to the rotational shaft, a fixed housing for rotatably supporting the rotational shaft, an electromagnetic shielding device for electrically shielding the magnetic field supply device and the sensing device, and a spacer interposed between the fixed housing and the electromagnetic shielding device for causing the electromagnetic shielding device to be held in the fixed housing.

Torque transducer

A torque transducer including: a ferromagneto-stricting device provided for a rotational shaft; a magnetic field supply device for supplying a magnetic field to the ferromagneto-stricting device; a sensing device for sensing the change in the magnetic permeability which has taken place due to torque acting on the rotational shaft; a fixed housing for rotatably supporting the rotational shaft via a bearing unit; and an electromagnetic shielding device for surrounding the magnetic field supply device and the sensing device to electromagnetically shield them. The magnetic field supply device comprises an exciting coil, while the sensing device comprises a sensing coil. The electromagnetic shielding device is supported by the fixed housing via an elastic holding member. A seal member is disposed outside the bearing unit. The fixed housing and the electromagnetic shielding device are electrically earthed.

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Shiga, Japan

Katsuyuki Miyake