Nippon Telegraph and Telephone Corporation

Other

Sharp Kabushiki Kaisha Corporation

Dainippon Screen Mfg. Co., Ltd.

Nuflare Technology, Inc.

Ntt Electronics Corporation

Catalysts & Chemicals Industries Co., Ltd.

Ntt Advanced Technology Corporation

Nippon Telephone and Telegraph Corporation

Nippon Telegraph Telephone Corporation

Katsuyuki Machida

Makoto Sato

Satoshi Shigematsu

Hiroki Morimura

Hakaru Kyuragi

Hiromu Ishii

Toshishige Shimamura

Norio Sato

Kazuo Imai

Masami Urano

Yasuyuki Tanabe

Hirofumi Morita

Yukio Okazaki

Fusao Shimokawa

Shingo Uchiyama

Johji Yamaguchi

Shuichiro Inagaki

Kunihiko Sasakura

Makoto Murakami

Shouji Yagi

Junichi Takahashi

Takahiro Hatano

Mamoru Nakanishi

Hideo Namatsu

Kazushige Minegishi

Toshiaki Tsuchiya

Akihiko Hirata

Tomomi Sakata

Nobuhiro Shimoyama

Yasuo Takahashi

Hideo Akiya

Katsumi Murase

Akira Nakashima

Ryo Muraguchi

Koji Fujii

Hideo Oikawa

Atsushi Tonai

Takuya Adachi

Hiroshi Matsumoto

Michio Komatsu

Munehiro Ogasawara

Ryoichi Yoshikawa

Tadao Nagatsuma

Tsutomu Ueyama

Namiko Ikeda

Izuru Iseki

Kenji Miura

Kazuhiro Chiba

Yuji Uenishi

Yoshiharu Ozaki

Kunio Saito

Hirokazu Yamada

Teruaki Safu

Toshifumi Konishi

Takaaki Matsushima

Tetsuya Oonishi

Kazuhisa Kudo

Toshihiko Kumazaki

Masaki Yano

Takanori Kiyokura

Michio Kimatsu

Chisato Hashimoto

Hideo Yoshino

Yukio 0Kazaki

A method for fabricating a blanking aperture array device for multi-beams includes forming, using a substrate over which a first insulating film, a first metal film, a second insulating film, and a second metal film are laminated in order, electrodes and pads on the second metal film, removing a part of the second metal film, removing the second insulating film using, as a mask, the electrodes, the pads, and a remaining part of the second metal film, and forming openings each being between a pair of electrodes, wherein, a part of the second metal film is etched such that some part of it remains in regions each connecting one of the electrodes and one of the pads, and a region in which entire openings are formed except the openings themselves is configured by the electrodes, pads, and first and second metal films such that the insulating film is not exposed.

Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams

A mirror device includes a mirror () which is supported to be pivotable with respect to a mirror substrate (), a driving electrode (---) which is formed on an electrode substrate () facing the mirror substrate, and an antistatic structure () which is arranged in a space between the mirror and the electrode substrate. This structure can fix the potential of the lower surface of the mirror and suppress drift of the mirror by applying a second potential to the antistatic structure.

Mirror device, mirror array, optical switch, mirror device manufacturing method, and mirror substrate manufacturing method

This invention includes an image quality priority level decision processing unit () which evaluates the magnitude of an image quality of each of a plurality of first image data formed from biometric images associated with the same target on the basis of a specific index having the relationship of a monotone function with authentication accuracy of biometric authentication, and outputs each of the first image data upon adding a priority level thereto on the basis of the evaluation result, a first image storage () unit which stores each of the first image data having a priority level added thereto from the image quality priority level decision processing unit (), a second image storage unit () which stores second image data used for comparison/collation with the first image data, an image collation unit () which compares/collates the second image data stored in the second image storage unit () with the first image data stored in the first image storage unit () and outputs the comparison/collation result, and a control unit () which controls each of the units. The control unit () causes the image collation unit () to compare/collate the second image data stored in the second image storage unit () with the first image data stored in the first image storage unit () in accordance with the priority levels, and outputs the comparison/collation result from the image collation unit ().

Biometric image collation apparatus and collation method therefor

A sensor cell includes a sensor electrode () formed on a substrate (), a signal output unit () which outputs a signal corresponding to a capacitance (Cf) formed between the sensor electrode and the surface of a finger (), a high-sensitivity electrode () formed on the substrate so as to be insulated and isolated from the sensor electrode, and a potential controller () which controls the potential of the finger surface via a capacitance (Cc) formed between the high-sensitivity electrode and the finger surface by controlling the potential of the high-sensitivity electrode. In this arrangement, when the resistance of the finger is high, the potential of the finger surface can be controlled so as not to fluctuate with the potential change of the sensor electrode. This makes it possible to increase the sensitivity of detection of the capacitance formed between the sensor electrode and the finger surface, so ridges and valleys of the finger surface can be clearly discriminated by outputs from a plurality of sensor cells.

Surface shape recognizing sensor device

A response signal generating unit () applies a predetermined supply signal (S) to a detection element () and outputs, as a response signal (S), a signal which has changed in accordance with the impedance of an object () with which the unit is in contact through the detection element (). A waveform information detection unit () detects waveform information corresponding to the impedance of the object () on the basis of the response signal (S) from the response signal generating unit (), and outputs a detection signal (S) representing the waveform information. A biometric recognition unit () determines on the basis of the detection signal (S) from the waveform information detection unit () whether or not the object () is a living body.

Organism recognition system

A detection element (A) having a detection electrode (A) connected to a surface shape detection unit () and a detection electrode (A) connected to a common potential, and a detection element (B) having a detection electrode (B) connected to the surface shape detection unit () and a detection electrode (B) connected to a biometric recognition unit () are arranged. The surface shape detection unit () outputs a signal representing the three-dimensional pattern of the surface shape corresponding to the contact portion to each detection element on the basis of individual capacitances obtained from the detection elements (A,B). The biometric recognition unit () determines whether an object () is a living body, on the basis of a signal corresponding to the impedance of the object () connected between the detection electrode (B) of the detection element (B) and the detection electrode (A) of the detection element (A).

Surface shape recognition sensor device

In a semiconductor device having a MEMS according to this invention, a plurality of units having movable portions for constituting a MEMS are monolithically mounted on a semiconductor substrate on which an integrated circuit including a driving circuit, sensor circuit, memory, and processor is formed. Each unit has a processor, memory, driving circuit, and sensor circuit.

Method of manufacturing a semiconductor device having MEMS

A row decoding circuit () outputs a select signal to a row set in a row range setting unit () to select a select signal line (), processing results from processing circuits () on this row are output to a data output line (), and a row adder () adds processing results output to a data output line () of a column set in a column range selector ().

Parallel processing device and parallel processing method

A master latch () is formed from a static circuit, and a slave latch () is formed from a dynamic circuit. The number of circuit elements can be smaller as compared to a slave latch formed from a static circuit so that the size and area of a master-slave flip-flop can be reduced. Since the master latch is formed from a static circuit, data can be held stably during the standby time by setting the master latch in a data holding state.

Master-slave flip-flop, trigger flip-flop and counter

A structure () which includes an overhang and a support portion supporting substantially the center of the overhang, and in which the area of the support portion is smaller than the area of the overhang in the two-dimensional direction of an upper electrode () is formed on the upper electrode () in a region above each lower electrodein one-to-one correspondence with the lower electrode (). An object of surface shape sensing, e.g., the tip of a finger () touches the surface of the overhang of the structure (), and the support portion of the structure () whose overhang is in contact with the object of sensing pushes down a portion of the upper electrode () toward the lower electrode (), thereby deforming the upper electrode ().

Method of fabricating a surface shape recognition sensor

Surface shape recognition sensor

A method of manufacturing a surface shape recognition sensor. A sacrificial film is formed on an interlevel dielectric to cover a lower electrode while keeping an upper portion of a support electrode exposed. An upper electrode is formed on the sacrificial film and support electrode. The sacrificial film is selectively removed and a protective film is formed on the upper electrode. A photosensitive resin film having photosensitivity is formed on the protective film. A plurality of projections are formed in a region of the protective film above a capacitive detection element. In this manner a plurality of capacitive detection elements each having the lower electrode and upper electrode are formed.

Method of manufacturing recognition sensor

Growing community of inventors

Kanagawa, Japan

Katsuyuki Machida