Mitsui Minings & Melting Co., Ltd.

Katsuyuki Hirai

Kazuo Moriya

Mikio Kimura

Hideo Wada

A method for measuring internal defects of a specimen, comprising the steps of allowing a finely focused laser beam to be incident into a specimen from its surface and observing the scattered light of the said laser beam from inside the said specimen from the surface of the specimen and in a different direction to the optical axis of incidence of the laser beam.

Method and apparatus for measuring internal defects for position and

Disclosed is a quantitative evaluation method of optical absorption image which applies rays of light to a sample to obtain a quantitative optical absorption image without using destructive inspection and which can measure automatically and easily the dispersion of resistivity of the sample by calculating the mean value and standard deviation of the quantitative optical absorption image.

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Tokyo, Japan

Katsuyuki Hirai