Olympus Corporation

Katsuyuki Hashimoto

Shunsuke Kurata

Yasunori Ikeno

Masahiko Yazawa

Kunihiko Sasaki

Akinori Araya

Yasunari Matsukawa

Haruyuki Tsuji

Yasutoshi Kitahara

A scanning laser microscope includes: an objective lens; an XY scanner; a Z scanner; a detector that detects fluorescence from a sample and that outputs luminance information; an image processor that generates an image based on the luminance information and scanning-position information; and a controller that controls these components, wherein while the controller shifts the scanning line by the XY scanner each time the controller scans one line by the XY scanner, the controller changes the scanning position in forward and return paths of the direction along the optical axis of the objective lens by the Z scanner, reverses, between the forward and return path, an orientation in which the scanning line is shifted by the XY scanner, and reverses, about an axial line along the main scanning direction, either the image of the plane in the forward path or the image of the plane in the return path.

Scanning laser microscope

Provided is a laser scanning microscope including a scanning unit that scans laser light emitted from a light source two-dimensionally across a specimen, a light-detecting unit that detects light coming from the specimen, an information-acquiring unit that acquires information about an observation mode, and a control unit that controls the scanning unit based on the information acquired by the information-acquiring unit. The scanning unit includes a galvanometer scanner and a resonant scanner that are alternately operable. The control unit controls the scanning unit to deactivate the resonant scanner if the information acquired by the information-acquiring unit indicates an observation mode in which the galvanometer scanner is used alone and to maintain the resonant scanner in an active state if the information acquired by the information-acquiring unit indicates an observation mode in which the galvanometer scanner and the resonant scanner are alternately used.

Laser scanning microscope

A laser scanning microscope includes a light irradiating portion that irradiates a sample; a PMT that detects fluorescence from the sample and outputs an intensity signal; a data processing portion that converts the intensity signal to brightness information at each pixel; a full-scale setting portion that can set a normal full scale that is smaller than the intensity signal when a light stimulus is given and an expanded full scale that is larger than the normal full scale, as a maximum range of the intensity signal that can be converted to brightness information; and a control portion that determines whether to switch between a normal observation mode and a stimulation observation mode; wherein the full-scale switching portion sets the normal full scale in the normal observation mode and sets the expanded full scale in the stimulation observation mode.

Laser microscope which expands the dynamic range of an intensity signal and suppresses degradation of a light detecting portion

A substrate housing method for a substrate processing apparatus, including: a first step of transporting the substrate taken out from a housing case to the substrate processing apparatus by a transport means; a third step of processing the substrate at the substrate processing apparatus; a fourth step of returning the substrate after the third step to the housing case by the transport means; a second step of calculating a difference in amount in relation to a normal position of the substrate at the transport means from the first step and before the fourth step; and a fifth step of adjusting a returning position of the substrate in the housing case after the third step and until the fourth step.

Substrate processing apparatus and substrate housing method

It is an object of the present invention to provide a substrate processing apparatus, comprising a housing body mounting unit that is capable of mounting a plurality of housing bodies which can house a plurality of substrates, a processing apparatus main body for processing a substrate extracted from the housing body, a transportation unit for transporting the substrate between the housing body and the processing apparatus main body, a processing control unit for controlling the transportation unit and making it transport the substrate between the housing body and the processing apparatus main body, and a transportation control unit for controlling the transportation unit and making it transport the substrate from one housing body to another housing body without passing through the processing apparatus main body.

Substrate processing apparatus and substrate processing system

A semiconductor wafer inspection apparatus is provided with a rotatable table on which a semiconductor wafer is held by suction, an illuminating device which illuminates at least an edge portion of the semiconductor wafer held on the rotatable table, an imaging device which captures an image of the edge portion of the semiconductor wafer when the edge portion is illuminated by the illuminating device, an image processing device which detects at least an edge cut amount or a crack by acquiring the image of the edge portion which is captured by the imaging device, and a display section which displays an image of the edge portion subjected to image processing by the image processing device.

Growing community of inventors

Tokyo, Japan

Katsuyuki Hashimoto