Renesas Electronics Corporation

Katsuyoshi Tsuchiya

Hiroshi Matsumoto

Akira Imaizumi

Shoji Tsuchioka

Akio Shibuya

An electrical characteristics test for a semiconductor integrated circuit using a Kelvin contact method can be conducted in a pre-process without obstructing the reduction in size of a semiconductor chip or without complicating the circuit design. A probe card in a testing apparatus includes probes for Kelvin contact, the probes for Kelvin contact including a coil probe and a POGO pin probe disposed inside the coil probe, and a probe for two-terminal measurement. Electrode pads formed in each chip area over a wafer are in a relation of A=B&#x3c;2A, given that the area of one of the electrode pads with which the probe for Kelvin contact comes into contact is B and the area of the other electrode pad with which the probe for two-terminal measurement comes into contact is A.

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Kanagawa, Japan

Katsuyoshi Tsuchiya