Central Glass Company, Limited

Katsuya Kondo

Shuhei Yamada

Yuki Fukui

Yuzo Okumura

Soichi Kumon

Yoshiharu Terui

Atsushi Ryokawa

Saori Shiota

The present invention is directed to a liquid chemical for forming a water-repellent protective film on a silicon element-containing wafer surface, a method of preparing the liquid chemical and a method of manufacturing a surface-treated body with the use of the liquid chemical, wherein the liquid chemical includes the following components: (I) a silylation agent; (II) at least one kind of nitrogen-containing compound selected from the group consisting of those of the following general formulas [1] and [2]; and (III) an organic solvent.

Liquid chemical for forming water-repellent protective film, method for preparing same, and method for manufacturing surface-treated body

According to the present disclosure, there is provided a water-repellent protective film-forming liquid chemical capable of achieving an improved water repellency imparting effect. The water-repellent protective film-forming liquid chemical according to the present disclosure contains the following compositions: (I) an aminosilane composition of the following general formula [1]; (II) a silicon compound of the following general formula [2]; and (III) an aprotic solvent, wherein the amount of the component (I) contained is 0.02 to 0.5 mass % based on the total amount of the components (I) to (III).(R)Si(H)(NH)&#x2003;&#x2003;[1](R)Si(H)X&#x2003;&#x2003;[2]

Chemical agent for forming water repellent protective film and surface treatment method for wafers

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Auderghem, Belgium

Katsuya Kondo