Sharp Kabushiki Kaisha Corporation

Katsutoshi Takao

Keita Hara

Jun Kudo

Mikihiro Yamanaka

Yuji Yashiro

Tomohisa Kawata

Norie Matsui

Yasuaki Murashi

Shuhji Nishiura

A chemical substance sensing elementfor detecting a specific chemical substance included in biological information includes a carbon nanostructure and, because of metal complex or a fluorescent molecule modifying its surface, exhibits substance selectivity and high sensitivity. Of the substances modifying the surface of carbon nanostructures, CoPc reacts with NO and pentane and DAF-2 reacts with NO, as the components contained in the biological information, respectively, and both produce reaction products. The reaction product derived from CoPc changes electric resistance between nodesand, and the reaction product derived from DAF-2 generates fluorescence of a specific wavelength when irradiated with excitation light. Therefore, by measuring the change in electric resistance or presence/absence and wavelength of fluorescent of the present element, sensing of NO or pentane is possible.

Chemical substance sensing element, chemical substance sensing apparatus, and method of manufacturing chemical substance sensing element

In the context of a measurement method in which scanning capacitance microscope(s) detecting surface(s) by means of electrically conductive probe(s) are used to measure electrical capacitance(s) of semiconductor sample surface(s), clean surface(s) are formed on semiconductor sample(s) by surface treatment; such semiconductor sample(s) are thereafter promptly placed in ultrahigh vacuum environment(s) (or inert gas environment(s)) and are maintained therein; and while still in this state, electrically conductive probe(s), on whose surface(s) stable insulating film(s) (e.g., vapor-deposited insulating diamond film(s)) are formed, are used to measure electrical capacitance(s) of semiconductor sample surface(s) while in ultrahigh vacuum environment(s) (or inert gas environment(s)).

Method of measuring electrical capacitance

Growing community of inventors

Osaka, Japan

Katsutoshi Takao