Tokyo Electron Limited

Katsushi Abe

Yohei Uchida

Tsuyoshi Hida

Naoki Sugawa

Nobuyuki Nagayama

Toshihiko Kikuchi

Hikaru Kikuchi

A placement apparatus for placing a workpiece is provided. The placement apparatus includes a stage on which a workpiece can be placed in a processing vessel; an edge ring including a locking part which is disposed on the stage so as to surround a periphery of the workpiece; a conductive connecting member connected with the edge ring at the locking part; and a first contacting member configured to cause the edge ring to contact the stage, while the edge ring is connected with the connecting member.

Workpiece placement apparatus and processing apparatus

A particle collecting apparatus includes a cylindrical housing, a gap forming unit, a supply port and an intake port. The cylindrical housing has a closed top and an open bottom facing a target object. The gap forming unit is configured to form a gap having a predetermined distance between the bottom and the target object. The supply port is formed at the opening of the bottom in an annular shape along an inner wall of the housing and configured to supply a gas to the target object. The intake port is provided closer to a central axis of the supply port than the supply port and configured to suck particles on the target object.

Particle collecting apparatus and particle collecting system

Growing community of inventors

Miyagi, Japan

Katsushi Abe