Hitachi, Ltd.

Katsuro Sugawara

Satoru Ito

Masataka Ota

Katsuhiko Itoh

Yukiyoshi Nakazawa

In growing on a substrate a film of substance of a similar kind to the substrate, ions are implanted into the substrate to form within the substrate a layer of substance having an optical property different from that of the substrate, and an epitaxial film is then grown. Thus, the thickness of the film can be monitored with an interference waveform appearing with its growth.

Method for monitoring thickness of epitaxial growth layer on substrate

A method of forming a passivation film, wherein after circuit elements have been formed in the semiconductor substrate, a thin conductive film is formed on the entire surface of the substrate and then an insulating film is formed through electric discharge on the surface of the thin conductive film while the thin conductive film is kept at a constant potential.

Growing community of inventors

Kodaira, Japan

Katsuro Sugawara