Anritsu Corporation

Katsunori Shinone

Yasuaki Nagashima

Tomoyuki Kikugawa

An n-type semiconductor substrate has a ( ) crystal plane as an upper surface. A mesa stripe portion has a trapezoidal shape including an n-type first clad layer, an active layer and a p-type second clad layer sequentially stacked on the substrate and formed along a <011> direction. A current block portion has a p-type current blocking layer and an n-type current blocking layer. A p-type third clad layer simultaneously covers both the upper surfaces of the mesa stripe portion and the current blocking portion. The inclination angle as being acute angle of the side surface of the mesa stripe portion is close to the inclination angle of a ( )B crystal plane with respect to the ( ) crystal plane and set at one of an angle larger than and an angle smaller than the inclination angle of the ( )B crystal plane.

Growing community of inventors

Atsugi, Japan

Katsunori Shinone