Central Glass Company, Limited

Katsunori Kawamura

Kazuhiko Maeda

Satoru Kobayashi

Haruhiko Komoriya

Satoru Miyazawa

Kazuhiro Yamanaka

Takeo Komata

Shinichi Sumida

Toshio Koishi

Kei Matsunaga

Seiiti Minegishi

Yoshiki Hirotsu

The present invention relates to a novel fluorine-containing cyclic compound that is derived from a norbornadiene and hexafluoroacetone and has an oxacyclopentane structure. This compound may be represented by the following formula (1) or (2). Furthermore, the present invention relates to a fluorine-containing polymer compound prepared by a polymerization or copolymerization using this fluorine-containing cyclic compound or its derivative. By using such fluorine-containing polymer compound, it is possible to provide a superior resist material and a fine pattern forming process using the same. 

Fluorinated cyclic compound, polymerizable fluoromonomer, fluoropolymer, resist material comprising the same, and method of forming pattern with the same

The invention relates to a fluorine-containing allyl ether compound represented by the formula 1, wherein R represents an organic group containing at least one fluorine atom and an alicyclic structure. The invention further relates to a fluorine-containing copolymer containing a first unit derived from the fluorine-containing allyl ether represented by the formula 1; and a second unit derived from a vinyl monomer.

Fluorine-containing allyl ether compounds, their copolymers, and resist compositions and anti-reflection film materials using such copolymers

A process for producing an &#x3b1;-substituted acrylic acid ester represented by the formula [1], wherein each of Rand Ris independently a hydrogen atom, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, sec-butyl group, tert-butyl group, fluoromethyl group, difluoromethyl group, trifluoromethyl group, or perfluoroethyl group, includes reacting an &#x3b1;-substituted acrylic acid anhydride represented by the formula [7], with 1,1-bis(trifluoromethyl)-1,3-diol represented by the formula [2].

Process for producing &#x3b1;-substituted acrylic acid esters

A fluorine-containing cyclic ester is represented by the formula 1:wherein each Rindependently represents &#x2014;H or &#x2014;F, wherein Ris one selected from the group consisting of &#x2014;H, &#x2014;F, &#x2014;CF, &#x2014;OH, &#x2014;COOH and &#x2014;COOR, where Ris an alkyl group having a carbon atom number of 1&#x2013;15, and wherein Ris a substituent selected from the group consisting of &#x2014;F, &#x2014;CF, and &#x2014;RC(CF)OR, where Ris one selected from the group consisting of CH, CH, and OCH, and Ris H or an acid-labile protecting group.

Fluorine-containing cyclic esters, fluorine-containing cyclic alcohols, and their production processes

A fluorine-containing cyclic compound is represented by the formula 1:

Fluorine-containing cyclic compounds, fluorine-containing polymerizable monomers, fluorine-containing polymers resist compositions and patterning method

The invention provides an adhesive for bonding together a first substrate made of a polyvinylidene fluoride resin and a second substrate. This adhesive includes an elastic fluorohydrocarbon resin, an acrylic resin, a polyvinylidene fluoride resin, a polyisocyanate, and an organic solvent. This elastic fluorohydrocarbon resin is obtained by graft copolymerization of a fluorine-containing copolymer with a vinylidene fluoride monomer. This copolymer is prepared by copolymerizing at least one first fluorine-containing monomer with at least one unsaturated monomer that has peroxy bond. The adhesive itself is superior in durability, and bond strength between the first and second substrates is also superior.

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Saitama, Japan

Katsunori Kawamura