Canon Kabushiki Kaisha

Katsumi Asada

Shinji Uchida

Hirohito Ito

Choshoku Sai

Shigeo Sakino

Shinji Wakui

Mikio Sato

Hiroshi Ito

Yoshikazu Miyajima

Hitoshi Sato

Kazunori Iwamoto

Mitsuru Inoue

Ryo Nawata

Eiji Osanai

Hideo Tanaka

Yasuhito Sasaki

The present invention provides an optical apparatus that deforms a reflecting surface of a mirror, comprising a base plate, a plurality of actuators that are disposed between the base plate and the mirror and are configured to apply a force to the mirror, a detection unit configured to detect vibration generated in the base plate, and a control unit configured to control each actuator based on a result of detection performed by the detection unit such that a deformation of the mirror caused as a result of the vibration generated in the base plate is within an acceptable range.

Optical apparatus, projection optical system, exposure apparatus, and method of manufacturing article

A vibration control apparatus includes a first spring mechanism to support a first object as part of a first system. To control vibration of the first object, a first actuator applies a force to the first object via a command value generated by a first computing based on an output of a detection system. The detection system includes a second spring mechanism to support a second object as part of a second system. A third spring mechanism supports a third object as part of a third system. The first displacement detector detects displacement of the third object relative to the second object. The third object is prevented from being displaced relative to the second object. A second natural frequency of the second system is higher than a first natural frequency of the first system, and a third natural frequency of a third system is higher than the first natural frequency.

Vibration control apparatus, lithography apparatus, and method of manufacturing article

An apparatus for moving a spherical mirror in which at least three actuators move the spherical mirror, at least five position sensors sense the position of the spherical mirror, and a controller calculates coordinates of a center of curvature of the spherical mirror with three-degrees-of-freedom, based on positions sensed by the at least five position sensors. The controller controls driving of the at least three actuators in accordance with a difference between the calculated coordinates and predetermined coordinates, so that the center of curvature of the spherical mirror is held fixed to the predetermined coordinates.

Apparatus for moving curved-surface mirror, exposure apparatus and device manufacturing method

An optical unit including a plate, an optical element, a fixing device for partially fixing the optical element against the plate, and a deforming device, located between the plate and the optical element, for applying a deforming force to the optical element to change a surface shape of the optical element. The deforming device includes poles for contacting a back face of the optical element, and actuators for driving the poles against the plate.

Optical unit and exposure apparatus having the same

A mirror apparatus including a reflecting mirror reflecting light, partition walls, the walls and the reflecting mirror defining a plurality of air chambers, and a regulator regulating air pressure in at least one of the air chambers. With this configuration, the front surface of the reflecting mirror is deformed into a smooth shape so as to correct optical aberration.

Reflecting mirror and exposure apparatus using the same

At least one exemplary embodiment is directed to an optical element holding apparatus including a force generating actuator configured to deform the optical element, a measuring device configured to measure a position of the optical element, and a displacement causing actuator configured to position the optical element based on the measured position.

Optical element holding apparatus, exposure apparatus and device manufacturing method

A stage device including a movable stage, a plate-like base which supports the stage, and a mass body which moves to cancel a reaction force acting on the base according to a movement of the movable stage. The plate-like base has a plurality of surfaces, and the stage and mass body are supported by different ones of the surfaces of the plate-like base.

Stage device, exposure apparatus, and device manufacturing method

A stage apparatus has a stationary portion, a movable portion and a linear motor for moving the movable portion in a prescribed direction by applying thrust between the stationary and movable portions. A first supporting member supports the stationary portion with a degree of freedom in the direction of movement, and a second supporting member has an axial supporting member for supporting the stationary portion rigidly in the direction of movement and flexibly in other directions. The second supporting member is isolated from the first supporting member in such a manner that vibration will not be transmitted to the first supporting member. The stage is used to scan a master plate in a scanning-type exposure apparatus, and the first supporting member is joined to a lens barrel table on which a projecting optical system is mounted.

Stage and exposure apparatus using same

A precision positioning apparatus suitable for the positioning control system of a semiconductor exposing apparatus such as a stepper has, as its object, the provision of a non-contact type precision positioning apparatus capable of properly correcting the disturbance of posture or vibration based on low rigidityy which is a feature of a non-contact guide mechanism and accomplishing stable, highly accurate positioning at a high speed. The precision positioning apparatus is provided with a base plate, a movable member positioned on the base plate, a driving device for driving the movable member, a detecting device for detecting movement of the movable member, and a device for supplying the driving device with a signal regarding the movement of the movable member on the basis of a reference value and the output value from the detecting device. The supplying device includes a device for forming a correction signal for substantially negating a disturbance force to the movable member, by the use of the signal supplied to the driving device and the output from the detecting device. The signal supplied to the driving device can be corrected by the correction signal.

Precision positioning apparatus

A stage driving system capable of positioning an object with a higher speed and a higher precision than prior systems. The system includes a base member, plural movable members provided on the base member, and a controller for controlling the plural movable members so as to substantially suppress the vibration of the base member caused by the displacements of the plural movable members.

Growing community of inventors

Utsunomiya, Japan

Katsumi Asada