Aera Japan Ltd.

Katsuhisa Nagano

It is intended to provide a vaporizer in a liquid material vaporizing and feeding apparatus for allowing a liquid to absorb heat efficiently and vaporizing it thereby without pulsation of the liquid or formation of air bubbles. In a lower end face of an upper member 20 is formed a recess 24 into which a liquid material inlet 22 opens, and a valve member 50 is disposed so as to cover the recess 24. With a spring S, the valve member 50 is urged in a direction in which it comes into close contact with the lower end face of the upper member 20. A vaporizing portion 26 is formed between an upper surface of the valve member 50 and the upper member 20, and a pressure intensifying portion 58 is formed by both the upper surface of the valve member 50 and the recess 24. A liquid material fed from the liquid material inlet 22 depresses the valve member 50 through the pressure intensifying portion 58, and when the liquid material is diffused in the vaporizing portion 26, it is heated and vaporizes in an instant.

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Akishima, Japan

Katsuhisa Nagano