National Institute of Advanced Industrial Science and Technology

Katsuhisa Murakami

Masayoshi Nagao

An electron emission device having a narrow electron energy range and excellent electron emitting efficiency, and an electron microscope using the electron emission device. An electron emission device having a laminated structure in which a first electrode, an electron accelerating layer made of an insulating film, and a second electrode are laminated in this order, in which the second electrode through which electrons transmit and from whose surface electrons emit, and the energy width of the emitted electrons is 100 meV or more and 600 meV or less. For example, graphene having one or more layers and 20 layers or less can be used as the second electrode, and hexagonal boron nitride can be used as the insulating film.

Electron emission device and electron microscope

Provided in the present disclosure is an electron emitting elementincluding a laminated structure in which a first electrode, an electron accelerating layermade of an insulation film, a second electrode, and a cover filmare laminated in that order, in which the second electrode is an electrode which transmits electrons and emits electrons from a surface thereof, and the cover film is a film which transmits electrons, is a protective film made of a material different from that of the second electrode, and constitutes an electron emission surface

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Tsukuba, Japan

Katsuhisa Murakami