Tokyo Electron Limited

Nihon Kohden Corporation

Katsuhiro Tsuchiya

Shinichi Hayashi

Yutaka Nagai

Nobuaki Matsuoka

Yasushi Hayashida

Takahiro Hashimoto

Kousuke Yoshihara

Hirofumi Takeguchi

Yuichi Terashita

Toshinobu Furusho

Yoshiyuki Takahara

Takashi Sasa

Katsunori Ichino

Masao Yamazaki

Mami Ikeda

A solution treatment apparatus connected to a supply nozzle that supplies a treatment solution to a substrate, includes: a supply pipeline connecting a treatment solution storage container and the supply nozzle; a filter apparatus provided in the supply pipeline; a pump on a secondary side of the filter apparatus; a circulation pipeline connecting a discharge side of the pump and an intake side of the filter apparatus; a supply control valve provided in the supply pipeline on a secondary side of the pump; a circulation control valve provided in the circulation pipeline; and a control unit, wherein the control unit opens the circulation control valve and drives the pump when supply of the treatment solution from the supply nozzle to the substrate is stopped by closing the supply control valve, to thereby circulate the treatment solution between the supply pipeline having the filter apparatus and the circulation pipeline.

Solution treatment apparatus and solution treatment method

A coating and developing system includes processing blocks of the same construction each built by stacking up a plurality of unit blocks including a film forming unit block and a developing unit block in layers. The processing blocks are arranged longitudinally between a carrier block and an interface block. The number of processing blocks like the processing blocks arranged between the carrier block and the interface block is adjusted to adjust the throughput of the coating and developing system. Thus, a coating and developing system capable of achieving a desired throughput can be easily designed and manufactured.

Coating and developing system with a direct carrying device in a processing block, coating and developing method and storage medium

A coating and developing system has a first processing block, a second processing block, and a transfer block interposed between the first and the second processing block. A first direct carrying means carries substrates from a carrier block to the transfer block. The transfer block distributes the substrates to respective film forming unit blocks of the first and the second processing block. Substrates on which films have been formed by the first and the second processing block are collected temporarily in the transfer block. A second direct carrying means carries the substrate collected in the transfer block from the transfer block to an interface block. Use of the first and the second processing block can improve the throughput of the coating and developing system. Since a carrying route from the carrier block to the first processing block, and a carrying route from the carrier block to the second processing block are the same, a carrying program is easy to create.

Coating and developing system, coating and developing method and storage medium

A coating and developing system that includes two rotating members having parallel horizontal axes of rotation and disposed longitudinally opposite to each other, a carrying passage forming mechanism extended between the rotating members to form a carrying passage, and capable of moving along an orbital path to carry a wafer supported thereon, a sending-in transfer unit disposed at the upstream end of the carrying passage, a sending-out transfer unit disposed at the downstream end of the carrying passage, a developer pouring nozzle for pouring a developer onto the wafer, a cleaning nozzle for pouring a cleaning liquid onto the wafer, and a gas nozzle for blowing a gas against the wafer. The developer pouring nozzle, the cleaning nozzle, and the gas nozzle are arranged in a direction in which the wafer is carried along the carrying passage between the upstream and the downstream end of the carrying passage.

A coater/developer is disclosed that includes a heating module having a pair of rotary bodies configured to rotate about respective horizontal axles, the rotary bodies being spaced apart from each other in a direction along the conveyance path of a substrate so that the rotational axles thereof are parallel to each other; a conveyance path member engaged with and extended between the rotary bodies so as to move along an orbit, the conveyance path member forming a part of the conveyance path of the substrate placed on the conveyance path member; a first transfer part provided at the upstream end of the conveyance path; a second transfer part provided at the downstream end of the conveyance path; and a heating part provided between the upstream end and the downstream end of the conveyance path and configured to heat the substrate.

Coater/developer, coating/developing method, and storage medium

A flow cell , a composite lens , and first to third detectors to are arranged in this sequence in the light pathway of light emitted from a laser light source . The composite lens is configured by a convex lens , and lens elements and . These lenses have different focal lengths. When the posture of the composite lens is correct, light impinging on the convex lens forms an image on the first detector. Therefore, the positioning of the composite lens is enabled. When particles in the flow cell are irradiated with laser light, forward scatter is produced. Forward small angle scatter having a small scattering angle impinges on the first lens element to be collected thereby, and is then received by the second detector . Forward large angle scatter having a large scattering angle impinges on the second lens element in the outermost periphery to be collected thereby, and is then received by the third detector which is remotest from the composite lens.

Particle analyzer and composite lens formed by integrally joining plural lens elements of different focal points

A flow cell 2, a composite lens 15, and first to third detectors 16 to 18 are arranged in this sequence in the light pathway of light emitted from a laser light source 1. The composite lens 15 is configured by a convex lens 15a, and lens elements 15b and 15c. These lenses have different focal lengths. When the posture of the composite lens is correct, light impinging on the convex lens forms an image on the first detector. Therefore, the positioning of the composite lens is enabled. When particles in the flow cell are irradiated with laser light, forward scatter is produced. Forward small angle scatter having a small scattering angle impinges on the first lens element 15b to be collected thereby, and is then received by the second detector 17. Forward large angle scatter having a large scattering angle impinges on the second lens element 15c in the outermost periphery to be collected thereby, and is then received by the third detector 18 which is remotest from the composite lens.

Particle analyzer and composite lens formed by integrally joining plural

A leukocyte classification reagent comprising at least one surface active agent selected from the group consisting of anionic active agents and amphoteric active agents lyses erythrocytes within a short period of time when added to a blood sample but does not cause damage on leukocytes for a certain period of time keeping their original state or close to the original state so that leukocytes can be classified directly into four groups, namely lymphocyte, monocyte, neutrophil and eosinophil, by measuring forward scattering and side-way scattering by a flow cytometer after lysis of erythrocytes.

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Tokyo, Japan

Katsuhiro Tsuchiya