Fujitsu Corporation

Katsuhiro Ozaki

Takayuki Sadakata

Hiroshi Yoshinaga

A system for discharging gas emitted from an apparatus or facility having a vacuum pump which sucks the gas emitted from the apparatus or facility while being supplied with a gas other than the sucked gas, the system comprising a unit for recovering at least part of the gas discharged from the vacuum pump, and recirculating the recovered gas to the vacuum pump as the gas other than the sucked gas. Part of the recovered gas may be recirculated to the apparatus or facility emitting the gas. The system reduces or eliminates emission to the atmosphere of global warming gases such as perfluorocompounds discharged from the vacuum pump, and also reduces the energy required for operating the vacuum pump. A method for discharging gas emitted from an apparatus or facility using a vacuum pump, wherein emission of global warming gases to the atmosphere is reduced or eliminated, is also disclosed.

Growing community of inventors

Kawasaki, Japan

Katsuhiro Ozaki