Fujifilm Corporation

Katsuhiro Nishimaki

Takayuki Ito

Hideaki Tsubaki

Toru Fujimori

Hidenori Takahashi

Shuji Hirano

Toshihiro Usa

Akihiko Ohtsu

Koji Shirakawa

Kenji Sugiyama

Akiko Hattori

Takeo Kido

Kohtaro Tashiro

In production of a mold having a deposited film on the surface thereof as a mold release layer, a quartz substrate plasma etched employing an etching gas that includes a sedimentary gas to form a pattern of protrusions and recesses having a desired shape in a structure constituted by the quartz substrate and a mask layer, while a deposited film constituted by sediment of the sedimentary gas is formed along the pattern of protrusions and recesses. The deposited film becomes the mold release layer. Thereby, throughput of mold production is improved in the production of molds having deposited films as mold release layers on the surfaces thereof.

Method for producing molds

A chemical amplification resist composition that is used for preparation of a mold, and a mold preparation method and a resist film each using the composition are provided.

Chemical amplification resist composition, and mold preparation method and resist film using the same

A metal plate having a pattern of protrusions on a first surface thereof is produced; photoresist is provided on a second surface of the metal plate; the photoresist is removed from a portion of the metal plate corresponding to a loop shaped outer peripheral cutout region that contacts the outer periphery of a mold region of the metal plate; and the metal plate is etched using the remaining photoresist as a mask, in a method for producing and a method for cutting a processing a master mold having a pattern of protrusions and recesses corresponding to data to be transferred on a surface thereof.

Method for producing a master mold and cutout processing method for a master mold

A magnetic transfer master disk including a magnetic layer and exhibiting excellent shape stability of a protrusion/recess pattern is provided. An initial layer formed of a conductive film is formed on a surface of a master on which a pattern of minute protrusions/recesses is formed, and then a magnetic layer (principal layer) is formed on the initial layer, and then, a metal layer is formed by electroforming. A duplicate in which the initial layer, the magnetic layer and the metal layer have been integrated is peeled off from the master, thereby obtaining a magnetic transfer master disk, which is a duplicate in which the magnetic layer and the initial layer are deposited on the protruded/recessed surface of the metal layer.

Magnetic transfer master disk and method for manufacturing the same

Growing community of inventors

Minami-ashigara, Japan

Katsuhiro Nishimaki