Daicel Chemical Industries, Ltd.

Daicel Corporation

Daicel Value Coating Ltd.

Katsuhiko Sumita

Masaya Omura

Naoko Tsuji

Akira Yamakawa

Takayuki Yaegashi

Yoshimichi Okano

Kanae Nishimura

Kazuyuki Okada

Ken Suzuki

Hiroshi Onomichi

Provided is a method suitable for efficiently manufacturing a semiconductor device while preventing warpage of the wafer laminate in manufacturing a semiconductor device in which semiconductor elements are multilayered through laminating wafers in which the semiconductor elements are fabricated. The method includes at least: preparing a plurality of first wafer laminates each having a laminate configuration including a first and second wafers each having an element forming surface and a back surface opposite from the element forming surface, the laminate configuration wherein the element forming surface sides of the first and second wafers are bonded to each other; thinning the first wafer of the first wafer laminate to form a first wafer laminate having the thinned first wafer; and bonding the thinned first wafer sides of two first wafer laminates having undergone the thinning to each other to form a second wafer laminate.

Semiconductor device manufacturing method

A release layer of a release film for producing a membrane electrode assembly of a polymer electrolyte fuel cell comprises a cyclic olefin polymer comprising an olefin unit having a Calkyl group as a side chain thereof. The release layer may have a glass transition temperature of about 210 to 350&#xb0; C. The release layer may have a transition point of a dynamic storage modulus E' in a range from &#x2212;50 to 100&#xb0; C. An ion exchange layer comprising an ion exchange polymer may be laminated on the release layer of the release film by a roll-to-roll processing to produce a laminate. The release film may be separated from the laminate to give the membrane electrode assembly. The release film achieves improved production of a membrane electrode assembly (an electrolyte membrane and/or an electrode membrane) of a polymer electrolyte fuel cell.

Release film, laminate and method for manufacturing same, and method for manufacturing fuel cell

A surface protective film which can be easily peeled off from an adhesive silicone rubber composition layer, is free of a plasticizer or the like which may have an adverse effect on adhesion of the adhesive silicone rubber composition layer to a semiconductor chip or semiconductor chip attaching portion, and has no adverse effect on thickness uniformity or surface flatness of the adhesive silicone rubber composition layer, and a process for producing the same. More specifically, a surface protective film for protecting an adhesive silicone rubber composition layer (C), comprising a base film (A) coated, at least on one side, with a cellulose-based resin layer (B) having an SP value of 21.0 to 29.0 (MPa), determined by the Fedors method, and process for producing the same.

Surface protective film and process for producing the same

A surface protective film which can be easily peeled off from an adhesive resin layer it protects, is free of any component which may have an adverse effect on adhesion of the adhesive resin layer to an object to which it is bonded, and has no adverse effect on thickness uniformity or surface flatness of the adhesive resin layer, and a process for producing the same. More specifically, a surface protective film for protecting an adhesive resin layer, comprising a base film (A) coated, at least on one side, with a cellulose-based resin layer (B) having an SP value of 21.0 to 29.0(MPa) , determined by the Fedors method, and process for producing the same.

Surface protective film for adhesive resin and process for producing the same

Growing community of inventors

Himeji, Japan

Katsuhiko Sumita