Kabushiki Kaisha Yaskawa Denki

Katsuhiko Shimada

Kazunori Hino

Ryuji Ando

Nobuyuki Furukawa

Yong-Gu Kang

Joseph Chang

A substrate support device includes a blade and at least one pad provided on the blade to support a substrate. The pad includes a first fixed member, a second fixed member, and a bridge. The first fixed member is provided at an outer portion of the blade. The outer portion is located outside an outer circumference portion of the substrate when the substrate is supported on the pad. The second fixed member is provided at an inner portion of the blade. The inner portion is under the substrate when the substrate is supported on the pad. The bridge is flexible and connects the first fixed member and the second fixed member to support the outer circumference portion of the substrate. An upper surface of the bridge is inclined downward from the first fixed member toward the second fixed member when the substrate is not supported on the pad.

Substrate support device, substrate conveyance robot, and aligner device

A robot hand and a robot according to an embodiment include supporting units. The supporting units are arranged on a base and contact the peripheral border of a board to grip the board. At least one of the supporting units rotates while abutting on the peripheral border of the board.

Growing community of inventors

Kitakyushu, Japan

Katsuhiko Shimada