Rigaku Corporation

Jaxel Corp.

Katsuhiko Ogiso

Takeyoshi Taguchi

A wall thickness of each layer or a size of a space between layers of a multilayer structured container can be easily measured with high accuracy. According to a method for measuring an inner size of a container by irradiating a multilayer structured containeras a target for measurement with X-rays radiated from an X-ray generating sourceand by detecting the X-rays transmitting the container by a detector, the X-ray generating source, a slit, and the detectorperform a linear scan to the containerin a direction orthogonal to beamsin addition to disposing the slit (a double slit)which narrows the X-rays transmitting the container down to the narrow beamsin front of the detectorand disposing a focal spotof the X-ray generating source, a center of the slit, and a center of the detectoron a same straight line. The X-ray beamsare irradiated substantially parallel to a tangential direction of a container peripheral wall, and the X-rays transmitting the container peripheral wall are detected by the detector; thereby a thickness of each layer or the space between layers of the container peripheral wall is measured based on an obtained intensity distribution curve of damping on transmission.

Method for measuring size of multilayer structured container

An X-ray condenser for condensing X-rays radiated from an X-ray source to a very small condensing spot is disclosed. X-rays from the X-ray source are formed to a parallel X-ray beam by a parallel type parabolic reflection mirror. The parallel X-ray beam is made monochromatic by an analyzing crystal and condensed to the condensing spot by a zone plate. The zone plate is constructed by alternately arranging a plurality of X-ray transmitting bands and a plurality of X-ray shielding bands and can condense the parallel X-ray beam to a very small focus point.

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Tokyo, Japan

Katsuhiko Ogiso