Ebara Corporation

Katsuaki Usui

Yoshinori Ojima

Kozo Matake

Hiroaki Ogamino

Masami Nagayama

Yasushi Hisabe

Genichi Sato

Satoshi Arai

Yoshimitsu Ishibashi

Norio Kimura

Masahiro Hatakeyama

Hiroyuki Shinozaki

Yukio Ikeda

Satoshi Mori

Toshiharu Nakazawa

Masayoshi Hirose

Katsuyuki Aoki

Toru Osuga

Tetsuro Sugiura

Masao Matsumura

Yoichi Kanemitsu

Yuji Shirao

Takanori Inada

Fumio Kondo

Takashi Hozumi

Ritsuo Kikuta

Takeshi Yoshioka

Atsushi Oyama

Kazuma Ito

Masaaki Kajiyama

Masaru Nakaniwa

Hiroyasu Kawashima

Masato Eguchi

Koichi Iwasaki

Keiji Maishigi

Nobuhito Miyashita

Yoshihiro Niimura

Takahiro Isozaki

Susumu Miyake

Chikako Honma

Jie Yuan Lin

An information processing apparatus detecting presence or absence of abnormality of a vacuum pump derived from a product produced within a target vacuum pump, including:

Information processing apparatus, information processing system, information processing method, program, substrate processing apparatus, criterion data determination apparatus, and criterion data determination method

The present invention relates to a dry vacuum pump unit capable of achieving ultimate pressure of about 1 Pa. The vacuum pump unit includes a main pump () disposed at an outside-pressure side, and a booster pump () disposed at a vacuum side. The booster pump () and the main pump () are coupled in series. The booster pump () has a higher pumping speed than that of the main pump (). Each of the main pump () and the booster pump () includes a pair of pump rotors (and), a casing () having an inlet port and an outlet port, and a pair of magnet rotors (and) rotatable with the pair of pump rotors.

Vacuum pump unit

A flowmeter can measure a small flow rate of fluid with high measurement precision, can be made small-sized, can deal with a variety of types of chemicals, and can be produced easily at a low cost. The flowmeter includes: a casing having an enlarged portion and being disposed vertically; and a float enclosed in the enlarged portion of the casing and at least partly having a detection surface. The float is to be pushed up by a fluid flowing from below into the casing and flowing upwardly in the casing. The flowmeter also includes at least one displacement sensor, disposed outside the enlarged portion of the casing, for detecting an axial displacement of the float by magnetizing the detection surface of the float.

Flowmeter having a float and a displacement sensor

A multishaft electric motor has a plurality of juxtaposed rotors having respective permanent magnets disposed therearound, and a plurality of sets of armature elements disposed fully circumferentially around the rotors, respectively, the permanent magnets of adjacent two of the rotors having a plurality of pairs of unlike magnetic poles for magnetically coupling the rotors through the armature elements between the permanent magnets. A positive-displacement vacuum pump includes a casing, a pair of pump rotors rotatably disposed in the casing in confronting relation to each other, and a two-shaft electric motor coupled to the pump rotors for rotating the pump rotors in opposite directions. The two-shaft electric motor may comprise a pair of juxtaposed rotors and a pair of sets of armature elements disposed fully circumferentially around the rotors, respectively.

Multishaft electric motor and positive-displacement pump combined with such multishaft electric motor

An apparatus for and a method of evacuating a vacuum chamber (process chamber) or the like of a semiconductor fabrication facility, for example. The evacuating apparatus has a vacuum chamber to be evacuated, a discharge pipe connecting the vacuum chamber to an atmospheric port, a vacuum pump connected to the discharge pipe and operable at a variable rotational speed, and a controller for controlling the rotational speed of the vacuum pump.

Evacuating unit with reduced diameter exhaust duct

Vacuum pump rotor and method of manufacturing the same

A vacuum pump for use in an evacuating system for a semiconductor fabrication apparatus is operated at a steady rotational speed to evacuate the semiconductor fabrication apparatus. Then, in response to a signal indicative of an operating state of the semiconductor fabrication apparatus which does not need to be evacuated, the rotational speed of the vacuum pump is reduced to an idling rotational speed, thereby to lower electric energy consumption by the vacuum pump.

Method of operating vacuum pump

A multistage positive-displacement vacuum pump which is preferably used in the fabrication of semiconductor devices and can be operated from atmospheric pressure. The vacuum pump comprises a pump casing, a pump assembly housed in the pump casing and comprising a pair of pump rotors rotatable in synchronism with each other and arranged in multiple stages, and an intermediate pressure chamber provided between a preceding stage and a subsequent stage in the pump casing. The shaft portions of the pump rotors located between the preceding and subsequent stages are located in the intermediate pressure chamber.

Multistage positive-displacement vacuum pump

Multishaft electric motor and positive-displacement pump combined with

A vacuum pump has a pump casing having a suction side where a suction port is located and a discharge side where a discharge port is located, a pump assembly housed in the pump casing and comprising a pair of pump rotors rotatable in synchronism with each other and having respective shafts, and a brushless direct-current motor mounted on the pump casing at a suction side of the pump casing. The motor has a pair of motor rotors comprising respective sets of permanent magnets which are mounted respectively on the shafts, a pair of cans surrounding outer circumferential and end surfaces of the motor rotors in sealing relation to the pump assembly, a motor stator mounted on the cans and housed in a water-cooled motor frame.

Vacuum pump motor arrangement having reduced heat generation

Magnetic levitation conveyor apparatus

A two-shaft rotary machine for use in a vacuum pump system includes rotors having a specific profile whereby any vibration and noise generated by the machine is minimized and its efficiency is increased. The number of lobes of each rotor is three or more. The tip and root portions of each rotor are defined by circular arcs, respectively, which are made smoothly continuous with each other through an involute curve. The ratio of the diameter of the tip circle to the diameter of the root circle is selected to fall within a range which is given by a specific expression.

Two-shaft type rotary machine having a tip circle diameter to shaft

Growing community of inventors

Tokyo, Japan

Katsuaki Usui