Mitutoyo Corporation

Katsuaki Anzawa

Kenji Abiko

Hideo Morita

The present invention relates to a surface contour measuring tracer permitting a probe element to move in the directions of X-, Y- and Z-axes. A support structure includes a base supporting thereon an X-slider and a Y-slider which are movable in the directions of X- and Y-axes, respectively. A Z-slider is supported on the X-slider so to be movable in the direction of a Z-axis. Supported on the Z-slider is a probe element, the movements of which in the directions of X-, Y- and Z-axes are permitted by the movements of the X-, Y- and Z-sliders. The X- and Y-sliders are normally held at neutral positions by a wire spring extending in the direction of the Z-axis, and the Z-slider is permitted to move in the direction of the Z-axis against the action of a coil spring and normally held at a neutral position.

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Kawasaki, Japan

Katsuaki Anzawa