USA As Represented by Secretary of the Navy

Kathryn Liotta

Kari Moran

A multi-mode, mode-matched, mems-based Coriolis vibratory gyroscope. A vibratory gyroscope apparatus, comprising a resonating proof mass having a top surface and a plurality of side surfaces substantially perpendicular to the top surface, wherein the proof mass is configured to facilitate in-plane motion at a mode-matched frequency, a plurality of comb capacitors, each coupled to one of the plurality of side surfaces, and configured to provide an in-plane sense metric while operating at the mode-matched frequency, and a plurality of serpentine springs configured to facilitate translational motion of the proof mass in directions substantially perpendicular to the top surface. Additionally, the apparatus may further comprise a gyroscope controller configured to receive, measure, and/or adjust the control signal for a plurality of sense modes, an actuator electrically coupled to the proof mass, and a plurality of electrodes each electrically coupled to each of the plurality of comb capacitors.

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San Diego, CA, United States of America

Kathryn Liotta