Entegris, Inc.

Kathleen L Hanson

Clari Nolet

William Smeaton

Steven E Haumersen

Scott Elfstrom

Thomas D Johnson

Material management systems and methods include material storage vessels with information (e.g., electronic information) storage. Information may be communicated from a storage device to a process tool controller and employed to set or adjust a process tool operating parameter. Material information may be determined by remote analysis and subsequently communicated to an electronic information storage device of a vessel containing such material. Location and movement of material storage vessels within a customer facility may be automatically tracked, with further transfer of material-specific information. Product information may be associatively stored with material-specific information utilized in product manufacture.

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Savage, MN, United States of America

Kathleen L Hanson