Siltronic Ag

Katharina May

Christian Hager

Christof Weber

Semiconductor wafers are coated with an epitaxially deposited layer in an epitaxy reactor, wherein at least one semiconductor wafer is arranged on a respective susceptor in the epitaxy reactor and a first deposition gas for coating the at least one semiconductor wafer is conducted through the epitaxy reactor, wherein an etching process in which a first etching gas and a carrier gas are conducted through the epitaxy reactor is carried out before the coating process, and wherein a cleaning process in which a second etching gas and subsequently in particular a second deposition gas are conducted through the epitaxy reactor after a predefinable number of coating processes, wherein for two or more etching processes preceding the respective coating process at least one variable which influences the etching process is set individually. Semiconductor wafers processed thereby have distinctly uniform topology.

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Burghausen, Germany

Katharina May