Applied Materials, Inc.

Gm Global Technolgoy Operations, Inc.

Dell Products Inc.

Karthik Ramanathan

Kartik Bhupendra Shah

Ala Moradian

Umesh M Kelkar

Elizabeth Neville

Orlando Trejo

Gregory J Wilson

Schubert S Chu

Nyi O Myo

Kevin Griffin

Adolph Miller Allen

Feng Chen

Prashanth Kothnur

Michael Sterling Jackson

Se Hyuck Oh

Satish Radhakrishnan

Mark Robert Denome

Wenjing Xu

Ashok Gopinath

Karthikeyan Balaraman

Xinyuan Chong

Weize Hu

Sergey Meirovich

Mitrabhanu Sahu

Mark William Verbrugge

Anil Kumar Sachdev

Sanjeev Baluja

Jeonghoon Oh

Paul R McHugh

Errol Antonio C Sanchez

Hanhong Chen

Zheng Yuan

Paul Brillhart

Joseph F AuBuchon

Lin Zhang

Anzhong Chang

Zhepeng Cong

Gopalakrishna B Prabhu

Steven Jeffrey Schmieg

Jeffrey A Tobin

Kin Pong Lo

Shuran Sheng

Edric Tong

Dhritiman Subha Kashyap

Mario Dave Silvetti

Richard Omar Collins

Kevin Joseph Bautista

Kenneth Brian Doering

Kevin L Perry

Nitin Pathak

Asim Tewari

James Omer L'Heureux

Chaowei Wang

Manish Hemkar

Anhthu Ngo

Atul Pant

Palamurali Gajendra

Manoj Kumar Venugopal

Rohit Mahakali

A first selection of a first fabrication process and/or first manufacturing equipment to perform manufacturing operations of the first fabrication process is received. The first selection is input into a digital replica of the first manufacturing equipment, where the digital replica outputs physical conditions of the first fabrication process. Environmental resource usage data indicative of a first environmental resource consumption of the first fabrication process run on the first manufacturing equipment based on the physical conditions of the first fabrication process is determined. A modification to the first fabrication process that reduces the environmental resource consumption of the first fabrication process run on the first manufacturing equipment is determined. Applying the modification to the first fabrication and/or providing the modification for display by a graphical user interface (GUI) is performed.

Eco-efficiency (sustainability) dashboard for semiconductor manufacturing

Heaters having a body with having a top and bottom comprising pyrolytic boron nitride (PBN), a first heater electrode and a second heater electrode are described. The heater electrodes can be enclosed within an electrically insulating standoff and connected to separate busbars to provide power. Heater assemblies including one or more of the heaters and processing chambers including the heater assemblies are also described.

PBN heaters for ALD temperature uniformity

Technologies directed to cooling flow according to predicted cooling parameters for substrate processing are described. In some embodiments, a method includes receiving first data indicative of a process recipe for processing a substrate in a processing chamber of a substrate processing system. The method further includes inputting the first data into a model. The model includes a digital twin configured to represent thermal characteristics of the processing chamber. The method further includes receiving, via the model, a predicted value of a parameter associated with a flow of coolant through a cooling loop of the processing chamber. The method further includes causing coolant to flow through the cooling loop based on the predicted value of the parameter during execution of the process recipe in the processing chamber.

Cooling flow in substrate processing according to predicted cooling parameters

A method including receiving, by a processing device, a first selection of at least one of a first fabrication process or first manufacturing equipment to perform manufacturing operations of the first fabrication process. The method can further include inputting the first selection into a digital replica of the first manufacturing equipment wherein the digital replica outputs physical conditions of the first fabrication process. The method may further include determining environmental resource usage data indicative of a first environmental resource consumption of the first fabrication process run on the first manufacturing equipment based on the physical conditions of the first fabrication process. The processing device may further determine a modification to the first fabrication process that reduces the environmental resource consumption of the first fabrication process run on the first manufacturing equipment. The method can further include performing at least one of applying the modification to the first fabrication.

Process recipe data associated a process to be performed for a substrate at a process chamber is provided as input to a trained machine learning model. A set of process recipe settings for the process that minimizes scratching on one or more surfaces of the substrate is determined based on one or more outputs of the machine learning model. The process is performed for the substrate at the process chamber in accordance with the determined set of process recipe settings.

Reducing substrate surface scratching using machine learning

A method includes receiving measurement data from multiple sensors positioned along a delivery line that delivers a liquid as a gas to one of a gas panel or a processing chamber; simulating, using a computer-generated model, one or more process parameters associated with the delivery line and a plurality of heater jackets positioned around the delivery line; comparing the measurement data with values of the one or more process parameters; and determining, based on at least a threshold deviation between the measurement data and the values of the one or more process parameters, that a fault exists that is associated with maintaining temperature within the delivery line consistent with a gaseous state of the liquid.

Parameter sensing and computer modeling for gas delivery health monitoring

Methods, software systems and processes to develop surrogate model-based optimizers for controlling and optimizing flow and pressure of purges between a showerhead and a heater having a substrate support to control non-uniformity inherent in a processing chamber due to geometric configuration and process regimes. The flow optimizer process utilizes experimental data from optimal process space coverage models, generated simulation data and statistical machine learning tools (i.e. regression models and global optimizers) to predict optimal flow rates for any user-specified process regime.

Machine learning based smart process recipe builder to improve azimuthal flow and thickness uniformity

Methods and systems for reducing substrate particle scratching using machine learning are provided. A machine learning model is trained to predict process recipe settings for a substrate temperature control process to be performed for a current substrate at a manufacturing system. First training data and second training data are generated for the machine learning model. The first training data includes historical data associated with prior process recipe settings for a prior substrate temperature control process performed for a prior substrate at a prior process chamber. The second training data is associated with a historical scratch profile of one or more surfaces of the prior substrate after performance of the prior substrate temperature control process according to the prior process recipe settings. The first training data and the second training data are provided to train the machine learning model to predict which process recipe settings for the substrate temperature control process to be performed for the current substrate correspond to a target scratch profile for one or more surfaces of the current substrate.

A method, system and computer-usable medium are disclosed for reducing communication payload in an e-commerce system. Certain embodiments include a computer-implemented method for storing, at a product host platform, product configuration data including, item identifiers associated with each item of a product configuration, descriptor data respectively associated with each item identifier, and a reductive identifier respectively associated with each item identifier, wherein the reductive identifier associated with each item identifier is generated, at least in part, from the descriptor data of the item identifier. In certain embodiments, the reductive identifiers stored in the product configuration data at the order platform are compared with the reductive identifiers in master product configuration data stored at the product host platform. In certain embodiments, the differences are used as a basis to update the configuration data at the order platform.

System for reducing communication payload on an electronic commerce network

Apparatus and methods to deposit a film using a batch processing chamber with a plurality of heating zones are described. The film is deposited on one or more substrates and the uniformity of the deposition thickness is determined at a plurality of points. The heating zones set points are applied to a sensitivity matrix and new temperature or power set points for the heating zones are determined and set. One or more substrates are processed using the new set points and the thickness uniformity is determined and may be adjusted again to increase the uniformity.

Apparatus and methods to improve ALD uniformity

Embodiments of the present disclosure generally relate to a susceptor for thermal processing of semiconductor substrates. In one embodiment, the susceptor includes a first rim, an inner region coupled to and surrounded by the first rim, and one or more annular protrusions formed on the inner region. The one or more annular protrusions may be formed on the inner region at a location corresponding to the location where a valley is formed on the substrate, and the one or more annular protrusions help reduce or eliminate the formation of the valley.

Susceptor design to eliminate deposition valleys in the wafer

Implementations of the present disclosure generally relate to a susceptor for thermal processing of semiconductor substrates. In one implementation, the susceptor includes a first rim surrounding and coupled to an inner region, and a second rim disposed between the inner rim and the first rim. The second rim includes an angled support surface having a plurality of cut-outs formed therein, and the angled support surface is inclined with respect to a top surface of the inner region.

Susceptor design to reduce edge thermal peak

A method for a motor vehicle includes using a regenerative brake system that produces electric current as a result of application of said regenerative brakes and sending at least a fraction of the electric current directly to an electrical accessory of the vehicle and bypassing the battery. One electrical accessory may be an electrically heated catalytic converter.

Method of using a regenerative brake system for heating a motor vehicle catalytic converter and powering other electrical accessories

A method of sizing a light-off core supporting a fixed quantity of a light-off catalyst for an exhaust gas treatment system having an electric heater upstream of the light-off catalyst for heating the exhaust gas includes measuring the cumulative hydrocarbon or carbon monoxide emissions leaving the exhaust gas treatment system for multiple volumetric sizes of the light-off core in accordance with a heating strategy. Alternatively, a model of the treatment system may be used to predict the cumulative hydrocarbon or carbon monoxide emissions. The method further includes selecting the volumetric size of the light-off core that is associated with the lowest cumulative hydrocarbon or carbon monoxide emissions level from the measured or predicted hydrocarbon or carbon monoxide emissions when the exhaust gas is heated in accordance with the heating strategy. The heating strategy may include pre-crank heating, post-crank heating, or a combination of pre-crank heating and post crank heating.

Optimized electrically heated exhaust gas treatment system

An exhaust system includes main line that runs through a three way converter (TWC) and then a lean NOtrap (LNT). The exhaust system further includes a bypass line configured to bypass the TWC. The LNT includes catalyst that is non-uniformly distributed along the longitudinal axis. The catalyst is distributed such that storage sites are weighted toward the upstream end of the LNT and oxidation and reduction sites are weighted toward the downstream end of the LNT.

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Growing community of inventors

Bengaluru, India

Karthik Ramanathan