Leica Microsystems Jena Gmbh

Leica Microsystems Semiconductor Gmbh

Karsten Urban

Joachim Wienecke

Andreas Birkner

Knut Hiltawski

Roland Hedrich

Winfried Deutscher

The invention concerns a system operating unit () having a column () that is attachable by way of at least two supports () to different points of a system housing (). In the preferred embodiment, this column is attached laterally to the housing, the supports serving for attachment to the housing of the system. In addition, a retaining bracket () is connected to the column () in such a way that a horizontal deflection of the retaining bracket () about a vertical axis is possible.

System operating unit

The invention is based on a substrate conveying module () for conveying substrates into a workstation () for inspection, measurement, or processing of the substrates, in which on because of connecting elements () in at least two side walls () of the substrate conveying module () and/or in at least two side walls () of the workstation (), the substrate conveying module () can, at the installation location of the workstation (), be flexibly connected thereto in different orientations with respect to the workstation () and/or can be coupled at different points to the workstation ().

Substrate conveying module and system made up of substrate conveying module and workstation

The invention relates to a holding device for wafers in an arrangement for wafer inspection, comprising two grippers (), each of which, in the closed state of the holding device (), encloses a subsection of the wafer circumference and which are connected to a drive device () and, when the latter is driven, the grippers () move away from each other for the purpose of opening the holding device () and move toward each other for the purpose of closing the holding device (), and a holding arm (), on which the two grippers () are pivotably mounted. In this case the holding arm () is mounted such that it can rotate about an axis (A) which lies substantially in the plane covered by the wafer (W), so that after a rotation through 180&#xb0; about the axis (A), a wafer (W) held between the grippers () has been turned.

Holding device for wafers

An arrangement for the visual inspection of substrates (S) comprises a microscope ( ) for viewing the substrate (S) present at an inspection point (I); at least one viewing field ( ), arranged next to a microscope viewing port ( ), for viewing an image or an image area of the substrate (S); and/or at least one further viewing field ( ), arranged next to the microscope viewing port ( ), for direct viewing of the substrate (S) or a portion of the substrate (S); the microscope viewing port ( ) and the viewing fields ( ) being arranged with respect to an operating position (P) in such a way that from the operating position (P), the viewer looks in a first viewing direction (A) perpendicularly onto the microscope viewing port ( ), and in at least one further viewing direction (B, B&prime;) approximately perpendicularly in each case onto one of the viewing fields ( ). The first viewing direction (A) and the viewing directions (B, B&prime;) enclose acute angles (&agr;, &agr;&prime;). The result is to create an inspection arrangement notable for favorable ergonomic properties and a compact design.

Growing community of inventors

Jena, Germany

Karsten Urban