Cvd Equipment Corporation

Eele Laboratories

Karlheinz Strobl

Leonard A Rosenbaum

James Acquaviva

Sandra Gainey

Paul J Decker

Paul Gasteiger

Ajay Kumar

Fluid reactors include a sealed housing enclosing a reactor core that includes at least one substrate-free multichannel reactor core element. Each reactor core element is made from a non-substrate mounted, open pore cellular network material having an asymmetric, tortuous, bi-continuous two-phase material structure and contains multiple perforating fluid channels. Multiple reactor core elements can be serially and/or parallelly piped in a sealed manner to form a reactor core for a fluid reactor with a higher production capacity.

Fluid reactors

The present invention relates to tools and system designs for chemical vapor deposition (CVD) systems and CVD synthesis used to deposit one or more thin film layers onto a flexible substrate or to grow nano-structured materials on large area flexible substrates and, more particularly, to scalable CVD coating and nanostructure manufacturing including CVD thin films and nano-structured materials such as nanotubes, nanowires and nanosheets.

Scalable CVD film and nanomaterial synthesis

The use of deposition modules groups for each CVD deposition position including at least two deposition modules, together with a Motion Control System that controls and confines the motion of said deposition modules, enables a quick deposition module exchange at the deposition locations of On-Line or Off-Line CVD coating system. This results in a high volume large area CVD coating system that can increase the commercial viability of a given CVD system design through production throughput increases, production cost reductions, overall higher process flexibility and/or improved film quality.

High-throughput CVD system

The present invention describes an &ldquo;L&rdquo;-shaped sub-component for a hollow reflective tube used as integrator and/or angle converter for an illumination system. Furthermore, this invention details methods of manufacturing such hollow reflective tubes comprising (1) the steps of forming &ldquo;L&rdquo;-shaped sub-components substrates with or without self-alignment and/or mounting features, (2) applying a reflective coating to the inside of said sub-components (3) and assembling said sub-components into hollow tubes. Preferably both sides of the &ldquo;L&rdquo;-shaped sub-components have identical spectral and angular dependent coating performance. A particularly suitable method for manufacturing these sub-components substrates is molding them in plastic and over-coating them with a base coating layer to enhance their specular reflectivity. One of the preferred methods of applying a highly reflective, environmentally stable enhanced Ag multi-layer stack is an ion-assisted e-beam deposition process with the substrates oriented symmetrically towards the effective thin film material emission source. The high index layer material is preferably a metal oxide or ZnS and the low index material is preferably an oxide or a fluoride material.

Growing community of inventors

Mount Sinai, NY, United States of America

Karlheinz Strobl