Degussa Aktiengesellschaft

Karlheinz Janzon

Helmut Mangold

Stipan Katusic

Rainer Golchert

Peer Plambeck-Fischer

Ingo Pauli

Doped, pyrogenically prepared oxides of metals and/or non-metals which are doped with one or more doping components in an amount of 0.00001 to 20 wt. %. The doping component may be a metal and/or non-metal or an oxide and/or a salt of a metal and/or a non-metal. The BET surface area of the doped oxide may be between 5 and 600 m /g. The doped pyrogenically prepared oxides of metals and/or non-metals are prepared by adding an aerosol which contains an aqueous solution of a metal and/or non-metal to the gas mixture during the flame hydrolysis of vaporizable compounds of metals and/or non-metals.

Doped, pyrogenically prepared oxides

Doped, pyrogenically prepared oxides of metals and/or non-metals which are doped with one or more doping components in an amount of 0.00001 to 20 wt. %. The doping component may be a metal and/or non-metal or an oxide and/or a salt of a metal and/or a non-metal. The BET surface area of the doped oxide may be between 5 and 600 m,/g. The doped pyrogenically prepared oxides of metals and/or non-metals are prepared by adding an aerosol which contains an aqueous solution of a metal and/or non-metal to the gas mixture during the flame hydrolysis of vaporizable compounds of metals and/or non-metals.

Pyrogenic oxides having a BET surface area of between 30 and 150 m.sup.2 /g have a viscosity of less than 2,500 mPas in an aqueous suspension. They are prepared by setting the hydrogen ratio gamma and the oxygen ratio lambda to less than one in a high-temperature flame hydrolysis. The pyrogenic oxides are employed in the CMP application in the electronics industry.

Growing community of inventors

Gelnhausen, Germany

Karlheinz Janzon