Linde Aktiengesellschaft

Singulus Technologies Ag

Karl Schmitt

Stefan Kempf

Bernhard Cord

Wolfgang Grone

Erich Eckhardt

Binio Binev

Uwe Horlitz

Frank Hofmann

Andreas Amrhein

A treatment machine comprises a chamber for the treatment of one substrate or a plurality of substrates. A rotatably supported temperature-controlled shaft () defines a cylindrical, gas-tight hollow space. A heating arrangement () is provided for electrically heating at least a part of the shaft () arranged in the chamber. The heating arrangement () comprises an accommodation mandrel () for accommodating at least one electrical heating element (), said accommodation mandrel () being arranged in a non-rotating manner and extending into the hollow space of the shaft (). An outer surface of the accommodation mandrel () is spaced apart from an inner surface of the shaft () by a gap.

Treatment machine, drive unit for a treatment machine and use of the treatment machine

Vehicles with differential speed steering are provided having a hydrostatic transmission on each side for driving the drive wheels on that side, a spring-loaded servo piston operating a final control element of each transmission, at least one control pressure pick-off connected to the operating cylinders for controlling forward and backward travel, a pair of second control pressure pick-offs connected with the operating cylinders for controlling turning, a manually controlled pilot valve in a connection between the second control pick-offs and the operating cylinder and a control pressure reducing valve acting on the second control pressure pick-offs reducing the pressure to prescribed characteristics independently of the incoming pressure with respect to the actuation path.

Vehicles with differential speed steering

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Sailauf, Germany

Karl Schmitt