Infineon Technologies Ag

Qimonda Ag

Aixuv Gmbh

Karl Kragler

Michael Sebald

Waltraud Herbst

Reinhard Springer

Albrecht Ehrmann

Florian Letzkus

Rainer Lebert

Wolf-Dieter Domke

Jörg Butschke

Larissa Juschkin

Manfred Meisen

Christian Reuter

The invention concerns an irradiation device for testing objects coated with light-sensitive paint, comprising a EUV radiation source, an optical system for filtering the radiation of the EUV radiation source a chamber for receiving the object, as well as systems for intersecting the trajectory of the rays on the object. The invention also concerns a method for operating such a device. The invention aims at obtaining as quickly as possible an illumination at least partly simultaneous of several irradiation fields, with different doses, by using an inexpensive laboratory radiation source without resorting to complex optical systems. Therefor, the invention provides a device comprising a simplified and compact optical system, with closable diaphragm apertures located in front of the object to be irradiated and at least one control sensor placed on the trajectory of the rays and enabling the radiation dose to be measured.

Irradiation device for testing objects coated with light-sensitive paint

Outgassing products, which are formed during the exposure of photoresist systems by laser irradiation, are adsorbed on a proof plate for further analysis.

Apparatus and method for proof of outgassing products

Based upon an existing or to be produced multi-layered semiconductor-insulator-semiconductor carrier layer wafer (SOI substrate), irregularity of the etching conditions between the center and the edge region occurring during dry etching can be counteracted by a number of alternative steps, in particular, an additional layer construction compensating for the etching irregularity so that in any event an approximately homogeneous etching removal takes place over the entire area of the wafer to be etched.

Method of producing large-area membrane masks by dry etching

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Erlangen, Germany

Karl Kragler