Air Liquide Electronics U.S. LP

Air Liquide Electronics Systems

Air Liquide Electronics Systems Sa

Other

Air Liquide America, L.p.

Karl J Urquhart

Norbert Fanjat

Laurent Langellier

Jean-Louis Marc

Georges Guarneri

Christophe Colin

Joe G Hoffman

David L Snyder

Richard Swindell

John B Thompson

Methods and systems for chemical management. In one embodiment, a blender is coupled to a processing system and configured to supply an appropriate solution or solutions to the system. Solutions provided by the blender are then reclaimed from the system and subsequently reintroduced for reuse. The blender may be operated to control the concentrations of various constituents in the solution prior to the solution being reintroduced to the system for reuse. Some chemicals introduced to the system may be temperature controlled. A back end vacuum pump subsystem separates gases from liquids as part of a waste management system.

Systems and methods for managing fluids in a processing environment using a liquid ring pump and reclamation system

Systems for managing fluids in a processing environment using a liquid ring pump and reclamation system

Systems and methods for managing fluids using a liquid ring pump

The invention is a method and apparatus for asynchronous blending and supply of chemical solutions. The method of the present invention includes a continuous blending system. This continuous blending system monitors the output and continuously adjusts the blending system to achieve a predetermined formulation of at least a first solution. A centralized monitoring system continuously evaluates the solutions and adjusts the output of the blender as needed to maintain the predetermined formulation of the solution. The system includes at least a first tank system. Any solutions that are delivered from this tank system are also continuously monitored, evaluated, and adjusted as needed by the centralized monitoring system.

Method and apparatus for asynchronous blending and supply of chemical solutions

Provided are a method and apparatus for continuously blending a chemical solution for use in semiconductor processing. The method involves the step of: mixing a first chemical stream with a second chemical stream in a controlled manner, to form a stream of a solution having a predetermined formulation. The apparatus allows one to practice the above method. The method and apparatus can accurately provide chemical solutions of desired concentration in a continuous manner. The invention has particular applicability in semiconductor device fabrication.

Method for continuously blending chemical solutions

On-site blending and distribution of oxide abrasives with other constituents as used in semiconductor applications. Constituent blending is accomplished through weighing components individually into a blending tank. Some components may be added by injection or weight. Alternatively blends can be made to varying concentrations by passing the blended oxide solution in a closed circulation loop through a calibrated encapsulated torroid coil to measure electrical conductivity. The resulting conductivity output may be used to add one or more component.

Process and apparatus for blending and distributing a slurry solution

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Allen, TX, United States of America

Karl J Urquhart