Carl Zeiss Smt Gmbh

Karl-Heinz Schimitzek

Jens Kugler

Hubert Holderer

Bernhard Gellrich

Stefan Hembacher

Thomas Ittner

Payam Tayebati

An optical imaging device, in particular for use in microlithography, includes a mask device for receiving a mask having a projection pattern, a projection device with an optical element group, a substrate device for receiving a substrate and an immersion zone. The optical element group is adapted to project the projection pattern onto the substrate and includes a plurality of optical elements with an immersion element to which the substrate is at least temporarily located adjacent to during operation. During operation, the immersion zone is located between the immersion element and the substrate and is at least temporarily filled with an immersion medium. A thermal attenuation device is provided, the thermal attenuation device being adapted to reduce fluctuations within the temperature distribution of the immersion element induced by the immersion medium.

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Oberkochen, Germany

Karl-Heinz Schimitzek