Infineon Technologies Ag

Karl-Heinz Kuesters

Josef Willer

Thomas Mikolajick

Christoph Ludwig

Dominik Olligs

Veronika Polei

Torsten Mueller

Norbert Schulze

A method for fabricating stacked non-volatile memory cells and non-volatile memory cell arrays are disclosed. A semiconductor wafer is provided having a charge-trapping layer and a conductive layer deposited on the surface of the semiconductor wafer. Using a mask layer on top of the conductive layer, contact holes are formed into which a contact fill material is deposited. A further conductive layer is deposited on the surface of the semiconductor wafer and is patterned so as to form word lines. The contact fill material is connected to a contact plug using the contact holes with the contact fill material as a landing pad.

Memory cell arrays and methods for producing memory cell arrays

A semiconductor memory having charge trapping memory cells, where the direction of current flow of each channel region of the memory transistors runs transversely with respect to the relevant word line, the bit lines are arranged on the top side of the word lines and in a manner electrically insulated from the latter, and electrically conductive local interconnects of source-drain regions are present, which are arranged in sections in interspaces between the word lines and in a manner electrically insulated from the latter and connected to the bit lines, wherein gate electrodes are arranged in trenches at least partly formed in the memory substrate.

Semiconductor memory having charge trapping memory cells and fabrication method thereof

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Boxdorf, Germany

Karl-Heinz Kuesters