Daimler-benz Ag

Licentia Patent-verwaltungs Gmbh

Karl-Heinrich Greeb

Reinhard Zachai

Hans-Juergen Fuesser

Tim Gutheit

Wolfram Muench

Mona Ferguson

Roland Herkert

Norbert Marschall

Wilhelm Senske

Reiner Schaub

A composite structure for electronic components, having a base substrate with a flat side provided with a depression, and having a cover layer which is disposed on the flat side structured by the depression, and the depression being covered to form a hollow structure. The depression in the base substrate is created prior to the deposition of the cover layer and has a clear width measured parallel to the flat side that is less than one-half of its clear depth measured before the cover layer is applied. The vapor phase deposited cover layer is formed from a material which has a sufficiently high surface tension to promote three-dimensional growth of the vapor phase deposited layer.

Composite structure and method for the production thereof

The present invention relates to an electrophotographic recording material and to a process for manufacturing it. The material comprises an electrically conductive substrate and a photoconductive layer of amorphous silicon and hydrogen applied thereto. The recording material is characterized by only a single photoconductive layer having an oxygen component of about 1 ppm to 1 atom percent. The recording material is produced by means of cathode sputtering.

Homogeneous photoconductive layer of amorphous silicon and hydrogen

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Dreieich, Germany

Karl-Heinrich Greeb