Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Tokyo Electron Limited (1 from 10,295 patents)
2. Innovent E.v. (2 patents)
1 patent:
1. 7630873 - Approximating eigensolutions for use in determining the profile of a structure formed on a semiconductor wafer