Steag Micro Tech Gmbh

Steag Microtech Gmbh Sternenfels

Karl Appich

Martin Kallis

Jakob Szekeresch

Torsten Gerisch

Eberhard Muhlfriedal

Manfred Stummer

Eberhard Muhlfriedel

A device for coating substrates with a capillary slot includes a component having a capillary slot with an outlet opening. A container filled with a coating fluid is provided. The component is positioned in the container such that the capillary slot communicates with the coating fluid and such that the coating fluid is supplied to the capillary slot. A device for moving vertically the outlet opening of the capillary slot relative to the container is also provided.

Method and device for lacquering or coating of a substrate by a

A device for coating substrates has a capillary slot which is used in a first step to apply lacquer to the substrate. In a second step, the lacquer layer thickness of the substrate is reduced and made more uniform by spinning in a spinning device.

Device for coating substrates in semiconductor production

A device for coating a plate has an open channel being open in an upward direction and a device for supplying a liquid to the open channel. The liquid in the open channel forms an convexly curved portion projecting upwardly from the open channel. A device for transporting a plate at a close distance past the open channel is provided, with which a surface to be coated of the plate facing the convexly curved portion of the liquid is guided such that a thin film of the liquid is deposited on the surface to be coated by adhesion effects. Another device for lacquering or coating plates or disks has a capillary slot that is filled with a liquid coating medium. The plate to be coated is advanced across the capillary slot with the surface to be coated facing downwardly so that due to the capillary effect a thin layer is deposited on the surface of the plate.

Capillary device for lacquering or coating plates or disks

Growing community of inventors

Sternenfels, Germany

Karl Appich