Palo Alto Research Center Inc.

Applied Materials, Inc.

Xerox Corporation

Intermolecular, Inc.

Palo Alto Resaerch Center Incorporated

Palo Alto Research Corporation Incorporated

Karl Anthony Littau

Steven A Buhler

John Stuart Fitch

Ashok K Sinha

Mei Yin Chang

Lawrence C Lei

Baomin Xu

Scott Eugene Solberg

Scott Alan Elrod

Alan F Morrison

David Kirtland Fork

Francisco Eduardo Torres

William S Wong

Meng H Lean

Ilya Perlov

Michael C Weisberg

Alfred W Mak

Roderick Craig Mosely

Ken Kaung Lai

Ivo Johannes Raaijmakers

Eric J Shrader

Ming Xi

Xinliang Lu

Moris Kori

David C Smith

Marvin De-Dui Liao

Chyi Chern

Michael Xiaoxuan Yang

Ling Chen

Michal Danek

Chien-Teh Kao

Salvador P Umotoy

Matthew Dixon Eisaman

Henry Ho

Scott Jong Ho Limb

Dashun Steve Zhou

Michael Yu Tak Young

Tony P Chiang

Peter Johan Nystrom

Cathie J Burke

Yu Wen Chang

Sergey V Barabash

Aihua Chen

Steven Aihua Chen

Richard Schmachtenberg, Iii

Bruce W Peuse

Anand Vasudev

Richard A Marsh

Vijay Kris Narasimhan

Stephen Weeks

John Richard Andrews

Minh Le

Daniel Lynn Larner

Bo Zheng

Thomas Hantschel

Dale Robert Du Bois

Anh Duong

Seon-Mee Cho

Anzhong Chang

Chen-An Chen

David G Duff

Semyon Sherstinsky

Shu Chang

Siqing Lu

Sang M Lee

Son Trinh

Ronald Lloyd Rose

Susan G Telford

Sharon S Berger

Meng Chu Tseng

Patrick C P Cheung

Bernardo Donoso

Lawrence Duane Bartholomew

Ping Jian

Michael Y Young

Ying Yu

Steven Yencheng Chen

Jennifer Meng Tseng

Jingang Su

Chiliang L Chen

Beverly Russo

Bevan Vo

Dale DuBois

Charles C Harris

James F Roberts

Timothy E Levine

Thomas Long

John R Bachellerie

Stuart Brinkley

Martin E McBriarty

Dong Won Koo

Jim Van Gogh

Raphael Stumpp

Majid Gharghi

Michael C Welsberg

Timothy Trang

Techniques for creating a high aspect feature and testing the efficacy of a gas-phase deposition process are provided. An example of a method for thin film deposition in a high aspect ratio feature includes preparing a first substrate for a material deposition process, depositing a plurality of spacers on a top surface of the first substrate, disposing a bottom surface of a second substrate on the plurality of spacers, and performing a gas-phase material deposition on the first substrate and the second substrate.

Thin film deposition in a high aspect ratio feature

Provided are novel compositions of current compliance layers (CCLs) as well as novel methods of fabricating such CCLs and novel architectures of arranging CCLs and memory cells in memory arrays. A CCL may comprise one of sulfur (S), selenium (Se), and tellurium (Te). The CCL may further comprise one of germanium (Ge) and silicon (Si). CCLs may be fabricated as amorphous structure and remain amorphous when heated to 400&#xb0; C. or 450&#xb0; C. and above. In some embodiments, CCLs have crystallization temperatures of greater than 400&#xb0; C. and, in some embodiments, glass transition temperatures of greater than 400&#xb0; C. CCLs may be fabricated using atomic layer deposition (ALD) as a nanolaminate of layers having different compositions. The composition, number, and arrangement of the layers in the nanolaminate is specifically selected to yield a desired composition of CCL.

Current compliance layers and memory arrays comprising thereof

Embodiments provided herein describe systems and method for processing substrates. A substrate is provided. A showerhead is positioned above the substrate. The showerhead includes a plurality of injection ports, at least one isolation channel, and at least one exhaust port on a bottom surface thereof. The at least one isolation channel separates the plurality of injection ports into two or more sections. The at least one exhaust port is positioned within the at least one isolation channel. The plurality of injection ports are not in fluid communication with the at least one exhaust port within the showerhead. At least one processing fluid is caused to be delivered from the plurality of injection ports onto the substrate. At least some of the at least one processing fluid is caused to be removed from the substrate through the at least one exhaust port.

Vapor based site-isolated processing systems and methods

A co-extrusion device includes at least one first inlet port to receive a first material, at least one second inlet port to receive a second material, a first combining channel arranged to receive the first material and the second material and combine the first and second materials into a first combined flow flowing in a first direction, a splitter channel arranged to receive the first combined flow and to split the first combined flow into at least two split flows in a second direction at least partially orthogonal to the first direction, wherein each split flow consists of the first and second materials, a second combining channel arranged to receive the split flows and combine the split flows into a second combined flow in the first direction, and at least one exit orifice arranged to allow the materials to exit the device as a single flow.

Interdigitated finger coextrusion device

A method for depositing a structure comprising interdigitated materials includes merging flows of at least two materials in a first direction into a first combined flow, dividing the first combined flow in a second direction to produce at least two separate flows, wherein the second direction is perpendicular to the first direction, and merging the two separate flows into a second combined flow.

Method for interdigitated finger coextrusion

A printed fuel cell having integrated gas channels, and having an anode layer, where a first gas diffusion electrode layer is periodically fixed to the anode layer, wherein the periodically fixed first gas diffusion electrode layer defines hydrogen flow field channels. A first catalyst material is coated or infused to the first gas diffusion electrode layer. An electrolyte membrane covers portions of the anode layer and first gas diffusion electrode layer with the first catalyst material. A second catalyst material is coated or infused to the electrolyte membrane. A second gas diffusion electrode layer is in operative association with the electrolyte membrane and second catalyst material, on a surface of the electrolyte membrane different from a surface of the electrolyte membrane which is in contact with the first gas diffusion electrode layer, and a perforated cathode is in contact with the second gas diffusion electrode layer.

Printed fuel cell with integrated gas channels

An electrode structure has a layer of at least two interdigitated materials, a first material being an electrically conductive material and a second material being an ionically conductive material, the materials residing co-planarly on a membrane in fluid form, at least one of the interdigitated materials forming a feature having an aspect ratio greater than one. A method of forming an electrode structure includes merging flows of an electrically conductive material and a second material in a first direction into a first combined flow, dividing the first combined flow in a second direction to produce at least two separate flows, each separate flow including flows of the electrically conductive material and the second material, merging the two separate flows into a second combined flow, repeating the merging and dividing flow as desired to produce a final combined flow, and depositing the final combined flow as an interdigitated structure in fluid form onto a substrate such that at least one of the materials forms a feature in the structure having an aspect ratio greater than one.

Interdigitated electrode device

A method comprises flowing process solution and electrode solution into a BPMED apparatus, applying a voltage such that the process solution is acidified and basified and dissolved COis generated, flowing the process solution out of the apparatus, and desorbing COout of the process solution. A method for desorbing COfrom an ocean comprises flowing seawater and electrode solution into a BPMED apparatus, applying a voltage such that dissolved COis generated, flowing the seawater out of the apparatus, and desorbing COout of the seawater. A method for producing a desalted solution and COgas comprises flowing process solution and electrode solution into a BPMED apparatus that includes one or more three-compartment cells, applying a voltage such that the process solution is acidified, basified, and desalted, flowing the process solution out of the apparatus, and desorbing COout of the process solution.

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A co-sputter technique is used to deposit In&#x2014;Ga&#x2014;Zn&#x2014;O films using PVD. The films are deposited in an atmosphere including both oxygen and argon. A heater setpoint of about 300 C results in a substrate temperature of about 165 C. One target includes an alloy of In, Ga, Zn, and O with an atomic ratio of In:Ga:Zn of about 1:1:1. The second target includes a compound of zinc oxide. The films exhibit the c-axis aligned crystalline (CAAC) phase in an as-deposited state, without the need of a subsequent anneal treatment.

Method to grow in-situ crystalline IGZO using co-sputtering targets

Inline methods for forming a photovoltaic cell electrode structure, wherein the photovoltaic cell includes a semiconductor substrate having a passivation layer thereon, includes providing a plurality of contact openings through the passivation layer to the semiconductor substrate, selectively plating a contact metal into the plurality of contact openings by printing electroless plating solution into the plurality of contact openings to deposit the contact metal, depositing a metal containing material on the deposited contact metal, and firing the deposited contact metal and the deposited metal containing material. The metal containing material may include a paste containing a silver or silver alloy along with a glass frit and is substantially free to completely free of lead. The methods may also use light activation of the passivation layer or use seed layers to assist in the plating.

Solar cell metallization using inline electroless plating

A co-extrusion device has at least one first inlet port to receive a first material, at least one second inlet port to receive a second material, a first combining channel arranged to receive the first material and the second material and combine the first and second materials into a first combined flow flowing in a first direction. a splitter channel arranged to receive the first combined flow and to split the first combined flow into at least two split flows in a second direction at least partially orthogonal to the first direction, wherein each split flow consists of the first and second materials, and a second combining channel arranged to receive the split flows and combine the split flows into a second combined flow in the first direction, and at least one exit orifice arranged to allow the materials to exit the device as a single flow. A method for depositing a structure comprising interdigitated materials includes merging flows of at least two materials in a first direction into a first combined flow, dividing the first combined flow in a second direction to produce at least two separate flows, wherein the second direction is perpendicular to the first direction, and merging the two separate flows into a second combined flow.

Carbon dioxide can be separated from gas streams using ion exchange, such as in an electrochemical cell. An anion exchange membrane can be configured to increase the efficiency of the system and to permit the flow of the carbon-containing ions within the system while reducing diffusion of protons and/or hydroxyl ions. A gas stream containing carbon dioxide can be introduced to the system on the cathode side, while a source of hydrogen-containing molecules can be introduced on the anode side. Operation of the system can separate the carbon dioxide from the gas stream and provide it at a separate outlet.

Separating gas using ion exchange

An apparatus for performing electrodialysis at pressures greater than or equal to the ambient pressure is described. The apparatus includes an electrodialysis membrane stack and housing. The electrodialysis membrane stack includes at least one electrodialysis cell. The electrodialysis apparatus includes electrodes that apply voltage across the electrodialysis stack. The housing pressurizes the electrodialysis stack at a stack pressure. The housing includes a cell chamber that receives the electrodialysis stack, the cell chamber including at least one pressurization port communicating with the cell chamber such that a portion of electrode solution is transmittable into a region of the cell chamber outside the electrodialysis stack. A system for performing electrodialysis at pressures greater than ambient pressure includes at least two solution loops, an electrode solution loop, and an electrodialysis apparatus operatively connected to the solution and electrode solution loops that performs electrodialysis at a stack pressure that is greater than ambient pressure.

High-pressure electrodialysis device

A process for producing a gas using an electrodialysis apparatus includes flowing at least two solutions and an electrode solution into the apparatus, pressurizing the apparatus at a stack pressure, applying a voltage to the apparatus's electrodialysis stack so a dissolved gas is generated in the second solution, flowing the second solution out of the apparatus, regenerating the gas out of the second solution, and collecting the gas. A process for generating a product, like a gas, liquid, or supercritical fluid, using an electrodialysis apparatus includes flowing at least two solutions and an electrode solution into the apparatus, adjusting the temperature and pressure so the product will be generated from the second solution, applying a voltage to the electrodialysis stack of the apparatus so that the product is generated in the second solution, flowing the second solution out of the apparatus, and regenerating the product from the second solution.

Electrodialytic separation of gas from aqueous carbonate and bicarbonate solutions

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Palo Alto, CA, United States of America

Karl Anthony Littau