Stmicroelectronics S.a.

Other

Stmicroelectronics (crolles 2) Sas

Karim Segueni

Pascal Ancey

Thomas Skotnicki

Guillaume Bouche

Fabrice Casset

Stéphane Monfray

Nicolas Abelé

Alexandre Talbot

Stephane Monfray

Bertrand Dubus

A Micro Electro Mechanical Systems resonance device includes a substrate, and an input electrode, connected to an alternating current source having an input frequency. The device also includes an output electrode, and at least one anchoring structure, connected to the substrate. The device further includes a vibratile structure connected to an anchoring structure by at least one junction, having a natural acoustic resonant frequency. The vibration under the effect of the input electrode, when it is powered, generates, on the output electrode, an alternating current wherein the output frequency is equal to the natural frequency. The vibratile structure and/or the anchoring structure includes a periodic structure. The periodic structure includes at least first and second zones different from each other, and corresponding respectively to first and second acoustic propagation properties.

Micro-electromechanical resonance device with periodic structure

A microresonator comprising a single-crystal silicon resonant element and at least one activation electrode placed close to the resonant element, in which the resonant element is placed in an opening of a semiconductor layer covering a substrate, the activation electrode being formed in the semiconductor layer and being level at the opening.

Microresonator

An electromechanical resonator includes a monocrystalline-silicon substrate (S) provided with an active zone (ZA) delimited by an insulating region, a vibrating beam () anchored by at least one of its free ends on the insulating region and including a monocrystalline-silicon vibrating central part (), and a control electrode (E) arranged above the beam and bearing on the active zone. The central part () of the beam is separated from the active zone (ZA) and from the control electrode (E).

Electromechanical resonator and method for fabricating such a resonator

Growing community of inventors

Saint Sauveur, France

Karim Segueni